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Ultra-lubricating solid thin film with space environment adaptabilit

A space environment, super-lubricating technology, applied in the direction of vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., can solve the problems such as the large gap between the life of the film and the space application requirements, and the breakage of the C-H bond. The effect of improving energy utilization efficiency, prolonging service life, and reducing exhaust emissions

Active Publication Date: 2019-05-28
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, according to the current research progress, the stability of the friction coefficient of the a-C:H film still needs to be improved. The C-H bond of the a-C:H-based superlubricating film is broken due to wear during service, and the life of the film is still far from the requirements of space applications.

Method used

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  • Ultra-lubricating solid thin film with space environment adaptabilit

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Effect test

Embodiment 1

[0028] Such as figure 1 As shown, a super-lubricant solid film with adaptability to the space environment is composed of a hydrogen diffusion prevention layer 2, a hydrogen storage intermediate layer 3, and a super-lubricating functional layer 4 sequentially attached to a substrate 1, wherein the substrate 1 Stainless steel 9Cr18, hydrogen diffusion prevention layer 2 is TiN, hydrogen storage intermediate layer 3 is TiH x , The super-lubricating functional layer 4 is a-C:H.

[0029] The thin film is prepared by reactive magnetron sputtering technology: the background vacuum of the vacuum chamber during the deposition process is less than or equal to 1×10 -3 Pa, the total deposition time is 1.5 hours.

[0030] (1) Preparation of hydrogen diffusion prevention layer 2: Ti target with purity higher than 99.99% is used as the target material, and high-purity nitrogen with purity greater than or equal to 99.999% is used as the reaction gas. Other parameters are selected by conventional t...

Embodiment 2

[0035] A super-lubricant solid film with space environment adaptability, the film is composed of a hydrogen diffusion prevention layer 2, a hydrogen storage intermediate layer 3, and a super-lubricating functional layer 4 which are sequentially attached to a substrate 1, wherein the substrate 1 is a bearing steel GCr15, hydrogen diffusion prevention layer 2 is ZrN, hydrogen storage intermediate layer 3 is TiFeH x , The super-lubricating functional layer 4 is a-C:H.

[0036] The thin film is prepared by reactive magnetron sputtering technology: the target material uses a Zr target with a purity higher than 99.99% and a Ti-Fe alloy target with a purity greater than or equal to 99.99% (mass ratio 50:50), and the purity of the reactive gas is better than 99.999 % High-purity hydrogen and acetylene gas with a purity better than 99.9%.

[0037] The thin film is prepared by reactive magnetron sputtering technology: the background vacuum of the vacuum chamber during the deposition process ...

Embodiment 3

[0043] A super-lubricating solid film with adaptability to space environment. The film is composed of a hydrogen diffusion prevention layer 2, a hydrogen storage intermediate layer 3 and a super-lubricating functional layer 4 which are sequentially attached to a substrate 1, wherein the substrate 1 is a titanium alloy Ti6Al4V, hydrogen diffusion prevention layer 2 is Al 2 O 3 , The hydrogen storage intermediate layer 3 is Ti 2 NiH x , The super-lubricating functional layer 4 is a-C:H.

[0044] The thin film is prepared by reactive magnetron sputtering technology: the background vacuum of the vacuum chamber during the deposition process is less than or equal to 1×10 -3 Pa, the total deposition time is 1.5 hours.

[0045] (1) Preparation of hydrogen diffusion prevention layer 2: Al target with purity greater than or equal to 99.99% is used as the target material, oxygen with purity greater than or equal to 99.99% is used as the reaction gas, other parameters are selected by convention...

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Abstract

The invention belongs to the technical field of super-lubricating thin films, and relates to an ultra-lubricating solid thin film with space environment adaptability. The thin film is composed of an anti-hydrogen-diffusion layer, a hydrogen-storage middle layer and an ultra-lubricating function layer located on a substrate in sequence, wherein the anti-hydrogen-diffusion layer is a compact with the largest crystal surface spacing less than 0.25 nm, the hydrogen-storage middle layer is a hydrogen storage material with the dehydrogenation temperature higher than that of the space environment temperature, and the ultra-lubrication functional layer comprises a-C:H. The ultra-lubricating solid thin film has the advantages that the service requirements of spacecraft movable parts can be met in the aspects of service life, friction coefficient stability and the like.

Description

Technical field [0001] The invention belongs to the technical field of super-lubricating films, and relates to a super-lubricating solid film with space environment adaptability. Background technique [0002] With the development of my country's aerospace industry, military spacecraft have put forward higher and higher requirements for the performance indicators of their payloads, such as the ultra-high positioning accuracy and high stability required by the antennas and cameras of military reconnaissance satellites. Performance, low vibration and noise, etc. Although the solid lubricating film (such as MoS 2 ) Basically meets the application requirements of my country’s current aircraft on different orbits, but its friction coefficient is relatively high (~0.05), and the friction torque fluctuates greatly, which cannot meet the requirements of subsequent military spacecraft for ultra-high precision, high stability, low vibration and noise The increasingly demanding demands. [000...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C23C14/08
Inventor 张凯锋周晖刘兴光冯兴国桑瑞鹏万志华
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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