Integrated micro-nano sensor and manufacturing method thereof

Abstract

The invention provides an integrated micro-nano sensor for detecting three parameters including the pH value, conductivity and temperature in water and a manufacturing method of the integrated micro-nano sensor. The sensor comprises a silicon substrate (14) and a glass substrate (10) which are bonded together; the silicon substrate (14) is provided with a temperature sensor (1), a pH value sensor(2) and a conductivity sensor (3); the pH value sensor (2) comprises an iridium / iridium oxide working electrode (5) and a platinum counter electrode (6) which are distributed in an inner circular ringand in an outer circular ring; the bottom of the pH value sensor (2) is provided with a downward open cavity, the downward open cavity and the glass substrate (10) form a potassium chloride saturatedsolution liquid storage cavity (12), and the top wall of the liquid storage cavity (12) is provided with a nano-scale conical micropore (9) array channel; the glass substrate (10) is provided with aliquid injection hole (13), and a sealant is arranged; a platinum electrode lead (11) is arranged on the upper surface of the glass substrate (10), and a silver / silver chloride reference electrode layer (7) is arranged at the tail end of the glass substrate (10); the three parameters at the same site in a water environment can be measured.

Description

technical field [0001] The invention relates to an integrated micro-nano sensor for fast on-line detection of three parameters of pH, conductivity and temperature in oceans, rivers, lakes, reservoirs and other water bodies and a manufacturing method thereof, which belongs to the technical field of environmental protection and also belongs to the technical field of sensors. Background technique [0002] pH value, conductivity and temperature are the basic parameters to characterize the quality of water environment, and must be measured indicators in the quality control of environmental water, domestic drinking water and marine water. The three parameters are interrelated and affect each other, so they must be measured at the same site at the same time to meet the requirements of preparation for determination. Conventional pH is measured by electrochemical method with glass electrode, and the response time is long; conductivity is measured by double electrodes, temperature is ...

AI Technical Summary

Problems solved by technology

This system is mostly three independent large electrodes, which cannot be integrated with other electrodes and prepared on a sensor chip. The distance and relative area between the working electrode and the counter electrode are difficult to control, and the measurement accuracy is affected.

It has been reported in the literature that a miniature Ag / AgCl all-solid-state reference electrode has been developed based on micro-nano manufacturing technology. However, due to the short storage time of the potassium chloride saturated solution required for the electrode on the electrode surface, the service life of the electrode is not long and cannot meet the requirements. Requirements for sensors to work continuously for a long time

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