Trench gate super-barrier rectifier
A super-barrier rectifier and trench gate technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of large channel resistance, large cell size, and difficult process, and achieve small channel resistance and repeatability. The effect of good performance and simple process
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[0044] Below in conjunction with specific embodiment of the present invention and accompanying drawing, the preparation method of the present invention is described in detail:
[0045] Figure 3(a)~Figure 3(h) Shown is the flow chart of making the trench gate super-barrier rectifier in this embodiment, and each step is described one by one below:
[0046] Step A: growing an N-type epitaxial layer 2 on an N-type substrate 1, and then performing etching in the N-type epitaxial layer 2 to form a trench 3, as shown in FIG. 3(a). According to common knowledge in the field, it can be known that the N-type substrate 1 is heavily doped, and the N-type epitaxial layer 2 is lightly doped. The specific doping concentration is based on the prior art and can be selected according to actual requirements, so it will not be repeated here. In this embodiment, the longitudinal cross-sectional shape of the trench 3 is a rectangle. According to common knowledge in the field, the depth of the tre...
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