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70results about How to "Increase channel density" patented technology

Reverse conducting IGBT

An insulated gate bipolar transistor (IGBT) is provided comprising a semiconductor substrate having the following regions in sequence: (i) a first region of a first conductive type having opposing surfaces, a column region of a second conductive type within the first region extending from a first of said opposing surfaces; (ii) a drift region of the second conductive type; (iii) a second region of the first conductive type, and (iv) a third region of the second conductive type. There is provided a gate electrode disposed to form a channel between the third region and the drift region, a first electrode operatively connected to the second region and the third region, a second electrode operatively connected to the first region and the column region. The arrangement of the IGBT is such that the column region is spaced from a second surface of the opposing surfaces of the first region, whereby a forward conduction path extends sequentially through the third region, the second region, the drift region, and the first region, and whereby a reverse conduction path extends sequentially through the second region, the drift region, the first region and the column region. Reverse conduction of the IGBT occurs through a thyristor structure which is embedded in the IGBT. Such an IGBT structure is advantageous over a reverse conducting IGBT structure in which an anti-parallel diode is integrated or embedded because it provides improved reverse conduction and snapback performance.
Owner:SINOPOWER SEMICON

Trench gate power transistor and manufacturing method therefor

The invention discloses a trench gate power transistor. The trench gate power transistor comprises a plurality of gate trenches with T-shaped structures, gate polycrystalline silicon is filled in a bottom trench of each gate trench, and a first dielectric layer is filled in a top trench of each gate trench; source regions are formed in body junction injection layers among the gate trenches; the depth of each source region is greater than that of the top trench of the corresponding gate trench; and a trench of a first contact hole in the top of each source region is formed by etching a semiconductor epitaxial layer between the first dielectric layers of the top trenches of the corresponding two adjacent gate trenches in a self-aligning manner, so that the distance between each two gate trenches can be reduced, and the density of channels is increased. Gate leading-out trenches are also T-shaped structure, a top trench of each gate leading-out trench is relatively wide, requirements of manufacturing of contact holes are met, the value of a bottom trench of each gate leading-out trench is relatively small, so that the depth of each gate leading-out trench is relatively small, and breakdown voltage of devices can be improved. The invention further discloses a manufacturing method for the trench gate power transistor.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Power field effect transistor and layout method thereof

The invention relates to a power field effect transistor which is integrated on a single silicon slice and a layout method thereof. The power field effect transistor consists of a plurality of unit lattices which are arranged in parallel, wherein each unit lattice comprises a gate region, a source region and a drain region; and the drain region and the source region are distributed on the two sides of the gate region respectively. The power field effect transistor is characterized in that: the gate region is bent and bends towards the drain region at a first end to form a first concave region, a first bent region and a first contact region on the drain region; the gate region bends towards the source region at a second end to form a second concave region, a second bent region and a second contact region on the source region; by the bent gate region, an effective channel width is increased, so that on resistance RDSON is reduced; the corresponding drain region and source region are not rectangular any longer but have different shapes on different regions, so that the height of each unit lattice is reduced to further reduce the on resistance RDSON; and the channel density of the field effect transistor can also be increased, so that the on resistance RDSON is reduced. A method for implementing the field effect transistor is more favorable and practical.
Owner:SILERGY SEMICON TECH (HANGZHOU) CO LTD

Trench gate power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) and manufacturing method thereof

The invention discloses a trench gate power MOSFET (Metal Oxide Semiconductor Field Effect Transistor), which comprises a semiconductor epitaxial layer, wherein a hard mask layer is formed on the surface of the semiconductor epitaxial layer; a gate trench pattern and a source area contact hole pattern which are simultaneously defined by a first trench mask plate are formed in the hard mask layer; the sizes of gate trenches are defined by the gate trench pattern; bottom areas of source area contact holes are completely defined by the source area contact hole pattern of the hard mask layer; a gate dielectric layer and a polysilicon gate are formed in each gate trench; an interlayer film is formed on the surface of the hard mask layer and the surface of the polysilicon gate; top areas of the source area contact holes penetrate through the interlayer film and are defined by a contact hole mask plate; the source area contact holes are formed by self-aligned superposition of the top areas and the bottom areas; and structures without registration deviation are formed between the top areas of the source area contact holes and the gate trenches. The invention also discloses a manufacturing method of the trench gate power MOSFET. According to the trench gate power MOSFET and the manufacturing method thereof, a distance between the gate trenches can be reduced and the channel density is increased.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Reverse conducting IGBT

An insulated gate bipolar transistor (IGBT) is provided comprising a semiconductor substrate having the following regions in sequence: (i) a first region of a first conductive type having opposing surfaces, a column region of a second conductive type within the first region extending from a first of said opposing surfaces; (ii) a drift region of the second conductive type; (iii) a second region of the first conductive type, and (iv) a third region of the second conductive type. There is provided a gate electrode disposed to form a channel between the third region and the drift region, a first electrode operatively connected to the second region and the third region, a second electrode operatively connected to the first region and the column region. The arrangement of the IGBT is such that the column region is spaced from a second surface of the opposing surfaces of the first region, whereby a forward conduction path extends sequentially through the third region, the second region, the drift region, and the first region, and whereby a reverse conduction path extends sequentially through the second region, the drift region, the first region and the column region. Reverse conduction of the IGBT occurs through a thyristor structure which is embedded in the IGBT. Such an IGBT structure is advantageous over a reverse conducting IGBT structure in which an anti-parallel diode is integrated or embedded because it provides improved reverse conduction and snapback performance.
Owner:SINOPOWER SEMICON

Trench gate MOSFET device with electric field shielding structure

The invention provides a trench gate MOSFET device with an electric field shielding structure, which comprises a substrate, a source electrode, a drain electrode, a gate trench, the electric field shielding structure, source electrode regions, a semiconductor region with a first conduction type, and one or more electric field shielding structures with a second conduction type positioned below the surface of the semiconductor region, the electric field shielding structures intersect with the side wall of the gate trench at an angle, and the source electrode regions are positioned on two sides or the periphery of the gate trench, and are divided into a plurality of source sub-regions by an electric field shielding structure. By arranging one or more electric field shielding structures intersecting with the side wall of the gate trench and reasonably arranging the arrangement mode of the electric field shielding structures, the cell size of the device can be effectively reduced, the channel density and the device conduction current density can be improved, the specific on-resistance of the device can be reduced, and the device conduction performance can be improved; meanwhile, the electric field shielding effect is enhanced, the electric field intensity in the gate oxide layer is reduced, and the long-term working stability and reliability of the device are improved.
Owner:ZHEJIANG UNIV HANGZHOU GLOBAL SCI & TECH INNOVATION CENT

Rectifying device and preparation method thereof

The present invention discloses a rectifying device and a preparation method thereof. The device comprises a substrate of a first conductive type, a cell area and a terminal area, wherein a groove type area is arranged on the right side of the substrate of the cell area, the bottom of the groove type area is equipped with a buried layer area of a second conductive type, and the rest areas of the right side of the substrate of the cell area except the groove type area are equipped with the body areas of the second conductive types. The rectifying device contains an MOS structure and a PN junction simultaneously, the advantages of the MOS device and a PN diode can be combined together, and by a groove type structure, the junction type field effect transistor parasitic resistance is not generated, the reduction of the positive conduction voltage drop is not limited, at the same time, the channel density of the device in the unit area also can be increased, and the device cost is reduced. The buried layer area of the second conductive type at the bottom of the groove type area enables a blocking voltage to be improved effectively. Therefore, the rectifying device is simple in structure and excellent in performance, and also has the low positive conduction voltage drop and the high blocking voltage.
Owner:WUXI CHINA RESOURCES HUAJING MICROELECTRONICS

Integrated structure of trenches and manufacturing method thereof

The invention discloses an integrated structure of trenches. A first trench and a second trench with large width difference are integrated on a semiconductor substrate at the same time; on the layoutstructure, the second trench is divided into a first sub-trench, a second sub-trench and a spacer region; the width difference between the first sub-trench and the first trench and the width difference between the second sub-trench and the first trench are small, and the depth difference among the first trench, the first sub-trench and the second sub-trench meets the required value after the anisotropic trench etching process; and the spacer region is removed by an isotropic anisotropic trench etching process to break through the first and second sub-trenches in the width direction and form asecond trench. The invention further discloses a manufacturing method of the integrated structure of the trenches. According to the invention, the defect that the trenches with large width differencehave large depth difference after the anisotropic etching process can be eliminated, the depth difference of the trenches with different widths is reduced or is not different, and when the integratedstructure of the trenches is applied to a trench gate semiconductor device, the breakdown voltage of the device can be improved or the specific on-resistance of the device can be reduced.
Owner:HUA HONG SEMICON WUXI LTD

Trench type vertical double-diffusion metal oxide semiconductor field effect transistor

The invention relates to a VDMOS, which comprises a semiconductor substrate, a body region formed in the substrate and a source region formed in the body region, wherein a trench penetrates through the source region and the body region and extends to the substrate, each trench gate structure comprises a gate dielectric layer formed on the inner wall of the trench and a gate layer filled in the trench, a first interlayer dielectric layer, a first metal layer, a second interlayer dielectric layer and a second metal layer are sequentially stacked on the source region and each trench gate structure, one of the first metal layer and the second metal layer is a gate metal layer and is connected with each gate layer through a gate region contact hole, the other one is a source metal layer and isconnected with the body region through a source region contact hole, and the number N of the trench gate structures on the same side of the source region contact hole in each cell structure is greaterthan or equal to 2. According to the invention, the number N of the trench gate structures on the same side of the source region contact holes in the cell structure is larger than or equal to 2, so that large breakover current can be obtained under the condition that the occupied area of trench gates is small.
Owner:CSMC TECH FAB2 CO LTD

Trench type insulated gate bipolar transistor and preparation method thereof

The invention provides a trench type insulated gate bipolar transistor and a preparation method thereof, which belong to the technical field of power semiconductors. According to the invention, a narrow bandgap semiconductor material is used to form a conductive channel and form ohmic contact with emitter metal due to the characteristics of high channel mobility of a narrow bandgap material such as silicon and small ohmic contact resistance with the emitter metal; channel resistance and ohmic resistance are reduced; the forward conduction voltage drop of a device is reduced; in addition, due to the characteristic of high critical breakdown field strength of a wide bandgap material such as silicon carbide, the device is not limited by a gate oxide layer and prevented from avalanche breakdown; the position of a breakdown point is changed; the breakdown voltage of the device is improved to a certain extent, so that the thickness of a drift region can be appropriately reduced at a certainvoltage level; the forward conduction voltage drop and the turn-off loss are further reduced; and the trade-off relationship between the turn-on voltage drop and the turn-off loss is optimized. In addition, the invention further provides a preparation method of the trench type insulated gate bipolar transistor.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Rectifier and manufacturing method thereof

The invention provides a rectifier and a manufacturing method thereof. The rectifier comprises a cellular region and a protection ring region. The cellular region comprises multiple rectifier diodes. Each rectifier diode comprises a substrate, an epitaxial layer arranged on the substrate, a P-type region arranged on the epitaxial layer, a groove penetrating through the P-type region, groove poly-crystalline silicon arranged in the groove, an oxide layer arranged between the groove wall of the groove and the groove poly-crystalline silicon, an N+ region arranged in the P-type region and positioned at the two sides of the groove, a front surface metal layer arranged on the P-type region, the N+ region and the groove poly-crystalline silicon, and a back surface metal layer arranged at the back surface of the substrate. The rectifier adopts a groove-type MOS structure so that parasitic JFET resistance is eliminated, and forward conduction voltage drop of the rectifier can be further reduced. Meanwhile, area of the chip is reduced and cost of the device is reduced. The manufacturing method of the rectifier adopts four photo-etching boards of a protection ring photo-etching board, a groove photo-etching board, a source region photo-etching board and a metal photo-etching board so that the manufacturing method of the rectifier has advantages of being simple in technology and low in manufacturing cost.
Owner:CSMC TECH FAB2 CO LTD

Preparation method of nano-titanium dioxide modified microchannel reactor

The invention provides a preparation method for a nano-TiO2 modified micro-channel reactor. The preparation method comprises the following steps: preparing a micro-channel reactor made of a transparent material, and cleaning the micro-channel reactor for later use; adding a titanium source in an acidic water solution or ammonia water to obtain a mixture, and stirring the mixture to form nano-TiO2 sol; injecting the nano-TiO2 sol in a channel of the later-use micro-channel reactor, staying for 5-30 min, and injecting deionized water in the channel of the micro-channel reactor for cleaning to obtain a nano-TiO2 sol particle modified micro-channel reactor; placing the nano-TiO2 sol particle modified micro-channel reactor in a 500-1,000 W infrared source to be illuminated, ultrasonically cleaning the passage with an acidic cleaning solution and deionized water in sequence, and obtaining the nano-TiO2 modified micro-channel reactor. The preparation method has the characteristics of being simple in preparation process, and easy to achieve industrial production; the micro-channel reactor, prepared according to the preparation method, has the characteristics of being high in density, convenient and high in efficiency.
Owner:QUZHOU UNIV

High-density optical fiber connector

The invention discloses a high-density optical fiber connector, which comprises a plug and a socket. The plug is connected with the socket in a matched mode. The plug comprises a shell I, and a positioning groove I is formed in the shell I. A light array cathode insertion core is arranged in the positioning groove I. A guide hole is formed in the end part of the light array cathode insertion core in the axial direction. The socket comprises a shell II, and a positioning groove II is arranged in the shell II. An optical array anode insertion core is arranged in the positioning groove II. A guide pin is arranged at the end part of the optical array anode insertion core in the axial direction. A light channel insertion pin is arranged on the end surface of the light array cathode insertion core. 48 light channels are arranged on the corresponding end surfaces of the light array anode insertion core. A positioning key is arranged on the end surface of the shell of the plug. A positioning key groove matched with the positioning key is formed on the corresponding end surface of the socket. According to the invention, the butt joint accuracy of the plug and the socket is improved. The use reliability and the endurance performance of the optical fiber connector are improved. The optical connection density of the optical fiber connector is also improved.
Owner:8TH RES INST OF CETC
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