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A kind of bulk metal/cermet nano-gradient material based on PVD technology and its preparation method and application

A technology of cermets and gradient materials, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problem of inability to prepare high-purity bulk metal/cermet nano-gradient materials, and achieve excellent film -Effect of base binding force

Active Publication Date: 2021-03-12
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to overcome the defect that PVD technology cannot prepare high-purity bulk metal / cermet nano-gradient materials in the prior art, and provide a method for preparing bulk metal / cermet nano-gradient materials based on PVD technology

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  • A kind of bulk metal/cermet nano-gradient material based on PVD technology and its preparation method and application
  • A kind of bulk metal/cermet nano-gradient material based on PVD technology and its preparation method and application
  • A kind of bulk metal/cermet nano-gradient material based on PVD technology and its preparation method and application

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Experimental program
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Embodiment 1

[0038] This embodiment provides a high-purity bulk Ti / TiN gradient nanomaterial, which is prepared by the following method.

[0039]Place the metal or conductive non-metallic substrate with smooth surface on the PVD equipment turret. The working surface of the target is facing the ceramic deposition surface of the substrate, and the positions of the two are fixed, and the distance between the two is 15cm. Then turn on the PVD coating machine and adjust the PVD core process parameters (Ti target current density 200A; substrate bias between -15V; deposition time 10h; nitrogen pressure adjustment in the furnace can be divided into three stages: the first stage 3h, nitrogen pressure from 0Pa gradually increased to 0.3Pa; second stage: 4h, nitrogen pressure gradually increased from 0.3Pa to 0.8Pa; third stage: 3h, nitrogen pressure gradually increased from 0.8Pa to 3.0Pa.) and non-core process parameters (PVD furnace The inner vacuum is less than 1×10 -3 Pa, argon flow control 100...

Embodiment 2

[0044] This embodiment provides a high-purity bulk Cr / CrN gradient nanomaterial, which is prepared by the following method.

[0045] Place the metal or conductive non-metallic substrate with smooth surface on the PVD equipment turret. The working surface of the target is facing the ceramic deposition surface of the substrate, and the positions of the two are fixed, and the distance between the two is 15cm. Then turn on the PVD coating machine and adjust the PVD core process parameters (Cr target current density 200A; substrate bias voltage is -15V; deposition time 10h; nitrogen pressure adjustment in the furnace can be divided into three stages: the first stage 3h, nitrogen pressure from 0Pa Gradually increased to 0.3Pa; second stage: 4h, nitrogen pressure gradually increased from 0.3Pa to 0.8Pa; third stage: 3h, nitrogen pressure gradually increased from 0.8Pa to 3.0Pa.) and non-core process parameters (PVD furnace Vacuum degree is less than 1×10 -3 Pa, argon flow control 10...

Embodiment 3

[0049] This embodiment provides a high-purity bulk AlCr / AlCrN gradient nanomaterial, which is prepared by the following method.

[0050] Place the metal or conductive non-metallic substrate with smooth surface on the PVD equipment turret. The working surface of the target is facing the ceramic deposition surface of the substrate, and the positions of the two are fixed, and the distance between the two is 15cm. Then turn on the PVD coating machine and adjust the PVD core process parameters (Al 50 Cr 50 Target current density 180A; substrate bias -15V; deposition time 10h; nitrogen pressure adjustment in the furnace can be divided into three stages: first stage 3h, nitrogen pressure gradually increased from 0Pa to 0.3Pa; second stage: 4h, nitrogen pressure Gradually increase from 0.3Pa to 0.8Pa; the third stage: 3h, the nitrogen pressure gradually increases from 0.8Pa to 3.0Pa.) and non-core process parameters (the vacuum degree in the PVD furnace is less than 1×10 -3 Pa, argo...

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Abstract

The invention relates to a block metal / a metal ceramic nano gradient material based on a PVD technology and a preparation method and application thereof. The preparation method comprises the followingsteps of S1, arranging the substrate on the PVD equipment rotating frame, controlling the working surface of the target material to be opposite to the substrate, and controlling the distance betweenthe working surface and the substrate is 7-50 cm; and S2, sequentially depositing the metal and the metal ceramic by controlling the current density, the substrate biasing, the deposition time and thenitrogen pressure of the target material to obtain the metal / metal ceramic nano material. According to the method, unconventional PVD control conditions are selected, the distance between the targetmaterial and the substrate, the current density of the target material, substrate biasing and other core process parameters are optimized, so that the negative pressure effect of the substrate is realized, the preparation of different components and structure gradient materials is realized; the prepared block metal / the metal ceramic nano gradient material has a gradient change rule characteristicfrom a bottom layer to a surface layer in hardness and the stress of block metal / the metal ceramic nano-gradient material, and excellent membrane-base binding force, bearing capacity, fracture toughness and friction abrasion performance are achieved.

Description

technical field [0001] The invention belongs to the field of metal materials, and in particular relates to a bulk metal / cermet nano-gradient material based on PVD technology and a preparation method and application thereof. Background technique [0002] With the rapid development of the national economy, people's requirements for metal materials are increasing day by day, which requires metal materials to have good fracture toughness, wear resistance, corrosion resistance, high fatigue performance, and anti-corrosion properties while having high strength. high temperature oxidation performance. Therefore, it is difficult to achieve the multifunctional goal of the material through the overall strengthening of the material. Aiming at multi-functional goals, metal and ceramic composites or metal and dissimilar metal composites are combined to achieve multifunctional materials, such as: using the strength and toughness of metals, and using the wear resistance, corrosion resista...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/14C23C14/06C23C14/54
Inventor 陈汪林颜安王成勇李炳新
Owner GUANGDONG UNIV OF TECH