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Plasma preparation technology of metal particle anti-oxidation layer

A technology of metal particles and anti-oxidation layer, used in metal processing equipment, transportation and packaging, etc., can solve the problems of easy corrosion of metal particle materials, difficult to match the thermal expansion coefficient between the anti-oxidation layer and the substrate, and poor anti-oxidation performance, and achieve large Utilize value and development prospects, improve anti-oxidation and anti-corrosion properties, low cost effect

Active Publication Date: 2021-04-30
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to propose a plasma preparation technology for the metal particle anti-oxidation layer in view of the defects in the background art that the metal particle material is easy to corrode, has poor oxidation resistance, and the thermal expansion coefficient of the anti-oxidation layer and the substrate is difficult to match.

Method used

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  • Plasma preparation technology of metal particle anti-oxidation layer
  • Plasma preparation technology of metal particle anti-oxidation layer
  • Plasma preparation technology of metal particle anti-oxidation layer

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Embodiment 1

[0021] A method for preparing a high-temperature-resistant and oxidation-resistant gradient ceramic / FSA composite structure, comprising the following steps:

[0022] Step 1. Weigh 50g of micron-sized FeSiAl (FSA) metal particles, and oxidize it in air at high temperature to obtain a precursor material. The oxidation temperature is 700°C, and the oxidation time is 10h;

[0023] Step 2. Process the precursor material (FSA@CLs) obtained in step 1 through plasma preparation technology; specifically: place the precursor material obtained in step 1 in a CVD furnace with an argon atmosphere, and the pressure in the furnace is 95Pa, the temperature Under the conditions of 850°C and plasma power of 450W, multiple plasma reactions were carried out. The single reaction time was 60s, the interval between two reactions was 20s, and the number of reactions was 20 times. After the reaction was completed, cool naturally to room temperature and take out As a result, the gradient ceramic / FSA co...

Embodiment 2

[0026] Compared with embodiment 1, this embodiment differs in that:

[0027] In step 2, when the precursor material (FSA@CLs) obtained in step 1 is processed by plasma preparation technology, the specific process is as follows: the precursor material obtained in step 1 is placed in a CVD furnace with an argon atmosphere, and the pressure in the furnace is 95Pa, The temperature is 750°C and the plasma power is 450W for multiple plasma reactions. The single reaction time is 40s, the interval between two reactions is 20s, and the number of reactions is 20 times. After the reaction is completed, it is naturally cooled to room temperature. Taking out the product, the gradient ceramic / FSA composite structure (FSA@GCLs) can be obtained.

Embodiment 3

[0029] Compared with embodiment 1, this embodiment differs in that:

[0030] In step 2, when the precursor material (FSA@CLs) obtained in step 1 is processed by plasma preparation technology, the specific process is as follows: the precursor material obtained in step 1 is placed in a CVD furnace with an argon atmosphere, and the pressure in the furnace is 95Pa, The temperature is 800°C and the plasma power is 450W for multiple plasma reactions. The single reaction time is 40s, the interval between two reactions is 20s, and the number of reactions is 20 times. After the reaction is completed, it is naturally cooled to room temperature. Taking out the product, the gradient ceramic / FSA composite structure (FSA@GCLs) can be obtained.

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Abstract

The invention relates to the plasma preparation technology of the anti-oxidation layer of metal particles. The specific process is as follows: the metal particles are oxidized at high temperature in the air to obtain a precursor material; High-temperature anti-oxidation gradient ceramic structure on the surface of the particles; among them, the pressure of plasma treatment is 50-150Pa, the temperature is 500-900°C, the power is 300-500W, the single reaction time is 20s-60s, and the interval time is 20-40s , The number of reactions is 20 to 40 times. The gradient ceramic layer formed by the invention can effectively reduce the transmission channel between FSA and the oxidizing atmosphere, and improve the anti-oxidation and anti-corrosion performance of FSA; compared with the traditional anti-oxidation coating, the gradient ceramic and metal particles grown in situ It has a high bonding strength, which greatly improves the matching of the thermal expansion coefficient of the high temperature resistant and anti-oxidation layer and the substrate.

Description

technical field [0001] The invention relates to a plasma preparation technology for an anti-oxidation layer of metal particles, in particular to a plasma technology for preparing a layer of gradient ceramic structure with good anti-oxidation effect on the surface of metal particles. Background technique [0002] Zero-valent metal particle materials are widely used in national defense, mechanical microelectronics, optical devices, biomedical, chemical energy and other fields. However, zero-valent metal particle materials without surface treatment have defects such as poor oxidation resistance and easy corrosion. CN105385987A discloses a method for preparing a high-temperature anti-oxidation layer on the surface of metal tungsten. The method is mainly to embed metal tungsten with a clean surface in a molybdenum infiltration agent, and obtain a tungsten-molybdenum solid solution layer on the surface of metal tungsten after heat treatment in an inert atmosphere. The semi-finish...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B22F1/00B22F1/02
CPCB22F1/14B22F1/145B22F1/16
Inventor 邓龙江郭阳简贤张丽尹良君谢建良
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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