A Broadband Perfect Absorber for Visible Light Based on Semiconductor Metasurface
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[0043] A broadband visible light absorber based on a semiconductor metasurface, including a metal reflective layer 1 and a dielectric layer 2 . The material of the metal reflective layer 1 is gold, and the thickness t is 100 nanometers. The material of the dielectric layer 2 is silicon, and the thickness h is 50 nm to 80 nm.
[0044] In order to prepare the above-mentioned absorber, first adopt ion beam sputtering deposition method on the upper surface of the sapphire substrate, deposit a gold film with a thickness of 100 nanometers as the metal reflective layer 1, and adopt ion beam sputtering deposition on the surface of the metal reflective layer 1 method, depositing a silicon film with a thickness of 70 nanometers as the dielectric layer 2, and then using the focused ion beam lithography method to etch the dielectric layer 2 to obtain the structure of the rhombic resonator 22, such as figure 1 shown.
[0045] Such as figure 2 As shown, the dielectric layer 2 is compose...
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