Low-warpage infrared cut-off filter and coating method thereof

An infrared cut-off and warpage technology, applied in the field of optical filters, can solve the problems of large warpage of infrared cut-off filters and low-warp infrared cut-off filters, so as to avoid absorption of mildew and reduce warpage Curvature deformation, easy yield effect

Pending Publication Date: 2019-09-03
HENAN DUBANG PHOTOELECTRIC CO LTD
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Problems solved by technology

[0004] In order to solve the above technical problems, the object of the present invention is to provide a low-warp infrared cut filter, which can solve the problem of large warpage of the infrared cut filter and effectively improve the subsequent processing yield of the infrared cut filter , thus suitable for UV-IR-CUT filter

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  • Low-warpage infrared cut-off filter and coating method thereof

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Embodiment Construction

[0026] The specific implementation method of the present invention will be further described below in conjunction with the accompanying drawings.

[0027] attached figure 1 It is an embodiment of the present invention, which discloses a low-warpage infrared cut-off filter, including a substrate and a composite film layer arranged on the surface of the substrate, the substrate is glass or plastic or ceramic or optical fiber substrate, The composite film layer is made of alternately laminated high-refractive-index material layers and low-refractive-index material layers, and the high-refractive index material layer is a material layer of titanium dioxide, trititanium pentoxide, tantalum pentoxide or niobium pentoxide , the low refractive index material layer is silicon dioxide, aluminum oxide or magnesium fluoride material layer.

[0028] The thickness of the high refractive index material layer is 5-200nm.

[0029] The thickness of the low refractive index material layer is 5...

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Abstract

The invention discloses a low-warpage infrared cut-off filter and a coating method thereof. The low-warpage infrared cut-off filter comprises a substrate and a composite film layer arranged on the surface of the substrate, wherein the composite film layer is made by high refractive index material H layers and low refractive index material L layers which are stacked alternatively; the high refractive index material layer is a titanium dioxide, or trititanium pentoxide, or tantalum oxide, or niobium pentaoxide material layer; the low refractive index material layer is a silica, or alumina, or magnesium fluoride material layer; and the thickness of the composite film layer is 1500 to 9000 nm. Through selection, cleaning, cleaning, coating, parameter inspection, re-cleaning and visual inspection, coating on the infrared cut-off filter is completed. In comparison with the prior art, specially optimized coating parameters are adopted to reduce warpage deformation caused by stress accumulation, the defects such as adsorption mildew spots caused by the conventional coating parameters for reducing the warpage are avoided, and enhancement of the subsequent processing yield is facilitated.

Description

technical field [0001] The invention relates to the technical field of optical filters, in particular to an infrared cut-off filter with low warpage and a coating method thereof. Background technique [0002] Infrared cut filter is an optical filter that allows visible light to pass through and cuts off or reflects infrared light. It is mainly used in digital cameras, mobile phones, computer cameras, monitors, videophones, etc. The light wave filters out the high-frequency band, and only allows the low-frequency light wave within a certain range to pass through. Adding an infrared cut-off filter between the lens and the CCD or CMOS image sensor can effectively suppress the ripple disturbance caused by the passage of light waves higher than the spatial frequency of the CCD or CMOS image sensor, and effectively suppress infrared light waves to improve the color CCD, CMOS The effective resolution and color reproduction of the image sensor make the image clear and stable. [0...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20G02B1/10C23C14/30
CPCG02B5/208G02B1/10C23C14/30
Inventor 李智超毕文江孙波曹志嫦方涛徐光科朱金波
Owner HENAN DUBANG PHOTOELECTRIC CO LTD
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