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Vanadium dioxide composite thin film with adjustable transmissivity, and preparation method thereof

A technology of vanadium dioxide and composite thin film, which is applied in liquid chemical plating, metal material coating technology, coating, etc., can solve the problems of complex thin film system, cumbersome regulation and preparation process, etc., achieve a wide range of applications, and avoid easy oxidation , Improve the effect of phase transition temperature

Inactive Publication Date: 2019-09-27
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the problems of cumbersome regulation and preparation process and complex film system in the background technology, the purpose of the present invention is to provide a vanadium dioxide composite film with adjustable transmittance and its preparation method

Method used

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  • Vanadium dioxide composite thin film with adjustable transmissivity, and preparation method thereof
  • Vanadium dioxide composite thin film with adjustable transmissivity, and preparation method thereof
  • Vanadium dioxide composite thin film with adjustable transmissivity, and preparation method thereof

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Embodiment 1

[0037] A method for preparing a vanadium dioxide composite film with adjustable transmittance, specifically comprising the following steps:

[0038] Step 1: Configure vanadium ion precursor solution and tungsten ion precursor solution by PAD (Polymer assisted deposition) method;

[0039] Step 2: Mix the vanadium ion precursor solution and the tungsten ion precursor solution in proportion to obtain a mixed solution, wherein the mass percentage of the tungsten ion precursor solution in the mixed solution is 0.5%, 1%, 1.5%, 2% and 2.5% ;

[0040] Step 3: Ultrasonic clean the substrate with acetone, absolute ethanol and deionized water for 10 minutes, and then dry it with nitrogen for later use;

[0041]Step 4: Spin-coat the mixed solution prepared in step 2 on the cleaned sapphire substrate by spin coating, keep it at a speed of 650r / min for 12s at a low speed, and keep it at a speed of 7000r / min for 40s at a high speed;

[0042] Step 5: Put the substrate spin-coated in step 4 ...

Embodiment 2

[0048] A method for preparing a vanadium dioxide composite film with adjustable transmittance, specifically comprising the following steps:

[0049] Step 1: Configure vanadium ion precursor solution and tungsten ion precursor solution by PAD (Polymer assisted deposition) method;

[0050] Step 2: Mix the vanadium ion precursor solution and the tungsten ion precursor solution in proportion to obtain a mixed solution, wherein the mass percentage of the tungsten ion precursor solution in the mixed solution is 0.5%, 1%, 1.5%, 2% and 2.5% ;

[0051] Step 3: Ultrasonic clean the substrate with acetone, absolute ethanol and deionized water for 10 minutes, and then dry it with nitrogen for later use;

[0052] Step 4: Spin-coat the vanadium ion precursor solution prepared in step 1 on the cleaned sapphire substrate, keep it at a low speed of 650r / min for 12s, and high speed at a speed of 7000r / min for 40s;

[0053] Step 5: Put the substrate spin-coated in step 4 into a tube furnace, a...

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Abstract

The invention provides a vanadium dioxide composite thin film with adjustable transmissivity, and a preparation method thereof, and belongs to the technical field of thin film material preparation. The vanadium dioxide composite thin film provided by the invention is prepared by alternately growing a thin film doped with vanadium dioxide and a thin film non-doped with vanadium dioxide, no extra adding layer is needed, and favorable growth can be realized between layers, so that a good thin film system is obtained. Meanwhile, according to the system, by utilizing the difference of phase-transition temperatures of the thin film layer doped with the vanadium dioxide and the thin film layer non-doped with the vanadium dioxide, the coexistence of a metal state and an insulation state of the thin film can be realized at one same temperature, the refractive index of the vanadium dioxide between a metal-state interface and a non-metal-state interface is large, back-and-forth multi-time reflection is carried out between the interfaces, destructive interference is produced, and reflection is reduced, so that the aims of increasing permeability and reducing reflectivity are achieved, and the composite thin film can adjust the transmissivity of a visible light wave band and a near-infrared light wave and.

Description

technical field [0001] The invention belongs to the technical field of film material preparation, and in particular relates to a vanadium dioxide composite film with adjustable transmittance and a preparation method thereof. Background technique [0002] Vanadium dioxide (vanadium dioxide, VO 2 ) is a typical binary metal oxide material with metal-insulator transition effect (Metal-Insulator transition, MIT), and its phase transition temperature is close to 68 °C. When the temperature is lower than the phase transition temperature, the vanadium dioxide material presents an insulating state, and the infrared light transmittance of the vanadium dioxide film is high at this time; as the temperature increases, after the phase transition temperature is exceeded, the infrared transmittance of the vanadium dioxide film Poor, presenting a highly reflective state. Based on the characteristic that the infrared light transmittance of vanadium dioxide film changes greatly before and a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C18/12
CPCC23C18/1216C23C18/1279C23C18/1295
Inventor 高敏罗盛鲜林媛王旭路畅潘泰松
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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