Micro-nano integrated solid-state thin-film lithium battery and preparation method thereof
A technology for integrating solid-state and lithium batteries, which is applied in the manufacture of nano-batteries, lithium batteries, secondary batteries, etc., can solve the problems that are difficult to meet the needs of high voltage and high current driving electronic devices, and achieve the effect of meeting high voltage
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[0046] The present invention also provides a specific embodiment of preparing thin-film lithium battery micro-unit 12, comprising the following steps:
[0047] Step 1: Prepare a substrate 11 made of a PET film, wash the surface of the PET film with ethanol, dry it in vacuum at 80° C. for 2 hours, and set aside.
[0048] Step 2: Print two current collectors 14 made of copper by screen printing on the substrate 11 made of PET film. The specific screen printing copper paste has a solid content of 70-80% and a viscosity of 1000-5000mPa. s, bake at 100°C for more than 10 minutes, and the thickness is 0-500nm.
[0049] Step 3: On the current collector 14, the sputtering material is LiCoO by radio frequency magnetron sputtering deposition method 2 positive electrode film 15, specifically at 1°C min -1 Raise the temperature of the sample stage to 780°C at a high speed. After the temperature reaches 780°C and keep it warm for 10 minutes, argon and oxygen are introduced. The argon flo...
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