Mass and efficient integral manufacturing method of terahertz hollow core rectangular waveguide

Abstract

The invention relates to a mass and efficient integral manufacturing method of a terahertz hollow core rectangular waveguide, and belongs to the field of precise manufacturing of a waveguide micro device. The mass and efficient integral manufacturing method comprises the following steps of 1, fabricating a sacrifice core die comprising low-melting point alloy; 2, electroplating gold on an upper surface of the sacrifice core die to obtain an electroplating gold layer; 3, taking a single-side gold plating body of the sacrifice core die from a substrate; 4, electroplating a second layer of gold on a surface of the single-side gold plating body of the sacrifice core die; 5, electroforming copper on a surface of the electroplating gold layer to obtain an electroforming copper layer; 6, performing precise polishing on a surface of the electroforming copper layer to obtain a required size; and 7, removing the low-melting point alloy to obtain the terahertz hollow core rectangular waveguide. By the processing method, high-accuracy mass production of the sacrifice core die can be achieved, the sacrifice core die is efficiently and conveniently removed by a heating method, so that the mass and efficient manufacturing of the terahertz hollow core rectangular waveguide can be achieved.

Description

technical field [0001] The invention relates to a mass-efficient overall manufacturing method of a terahertz hollow-core rectangular waveguide, which belongs to the field of precision manufacturing of waveguide micro-devices. Background technique [0002] Terahertz waves generally refer to electromagnetic waves with a frequency between 0.1THZ and 10THZ. They are in the transition stage from macroscopic electronics to microscopic electronics, so they have many unique properties. It has important research value and broad application prospects in basic physical science, ultra-high-speed communication, high-resolution imaging, safety inspection, non-destructive testing, etc., and has great strategic significance for promoting national economic development and strengthening national security. [0003] When terahertz waves are transmitted in the air, water and oxygen in the air will cause a large transmission loss. In order to reduce the loss in the transmission process, a terahe...

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Problems solved by technology

[0005] As the operating frequency continues to increase, the size of the end face of the rectangular waveguide decreases accordingly, and the requirements for the processing fillet radius and surface roughness are also getting higher and higher, which makes some existing processing methods unusable, and other technologies must be developed

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