A system and method for preparing zirconium coating layer by chemical vapor deposition
A chemical vapor deposition and cladding technology, which is applied in the direction of gaseous chemical plating, coating, metal material coating process, etc., can solve the problems of high temperature, low process efficiency, high cost of Zr cladding materials, etc., and achieve deposition efficiency Improvement, production cost reduction, good economic and social benefits
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Embodiment 1
[0027] combine figure 1 , the present invention prepares the system of Zr coated coating to comprise: gasification device 1, fluidized bed 2, powder body silo 3, material silo to be coated 4, coating fluidized bed 5, product bin 6, tail gas treatment device 7;
[0028] The gas inlet of the gasification device 1 is connected with the inert gas through a pipeline and a gas valve; the gas outlet of the gasification device 1 is connected with the gas inlet of the fluidized bed 2 through a pipeline; the fluidized bed 2 Bottom gas inlet with inert gas and H 2 Be connected by pipeline and gas valve; The gas outlet of described fluidized bed 2 is connected with the air inlet of described tail gas treatment device 7 by pipeline; The outlet of described fluidized bed 2 is connected with described powder silo 3 The feed inlet of the powder silo is connected with a material valve through a pipeline; the air inlet at the bottom of the powder silo 3 is connected with an inert gas through ...
Embodiment 2
[0030] In this embodiment, the preparation of the zirconium coating layer using the systemic chemical vapor deposition in the above embodiment 1 specifically includes the following steps:
[0031]The inert gas enters the gasification device 1 through the pipeline and the gas valve, and at a certain temperature, the gas-carrying material enters the fluidized bed 2 through the pipeline; H 2 Enter the fluidized bed 2 through pipelines and gas valves, and react at a certain temperature for a certain period of time. The reacted gas is discharged or recycled after being processed by the tail gas treatment device 7, and the reacted materials pass through pipelines and material valves. Enter the powder silo 3; under the carrying action of the inert gas, the material in the powder silo 3 enters the coating fluidized bed 5; the material in the material silo 4 to be coated passes through The pipeline and material valve enter the coated fluidized bed 5, and react at a certain temperature ...
Embodiment 3
[0033] In this embodiment, on the basis of the above-mentioned embodiment 2, the carrier gas in the gasification device 1 is Ar gas, the material is zirconium tetrachloride, and the temperature is 450 °C; the H in the fluidized bed 2 2 The molar ratio with zirconium tetrachloride is 0.5, the reaction temperature is 800°C, and the reaction time is 60min; the material in the material bin 4 to be coated is ZrO 2 powder; the reaction temperature in the coating fluidized bed 5 is 700°C, and the deposition and coating time is 60 minutes; ZrO coated with Zr is obtained in the product bin 6 2 Powder. figure 2 ZrO coated with zirconium 2 The EDS energy spectrum of the powder, in which the molar ratio of Zr / O is about 0.7, reduces the cost by about 20% compared with the traditional process.
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