Terahertz metamaterial converter with switchable ring couple and galvanic couple based on MEMS planar structure reconstruction and preparation method thereof

A planar structure and metamaterial technology, applied in the process of producing decorative surface effects, microstructure technology, microstructure devices, etc., can solve the problems of small linear properties, narrow selection of active materials, and complex external equipment, etc. Achieve the effect of improving modulation depth, solving small tuning depth, and enhancing modulation depth

Active Publication Date: 2019-12-03
HARBIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to solve the problems of small modulation depth of ring even resonance of planar terahertz metamaterials, complex external equipment required for e

Method used

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  • Terahertz metamaterial converter with switchable ring couple and galvanic couple based on MEMS planar structure reconstruction and preparation method thereof
  • Terahertz metamaterial converter with switchable ring couple and galvanic couple based on MEMS planar structure reconstruction and preparation method thereof
  • Terahertz metamaterial converter with switchable ring couple and galvanic couple based on MEMS planar structure reconstruction and preparation method thereof

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specific Embodiment approach 1

[0041] Specific implementation mode one: combine figure 1 , this embodiment is a terahertz metamaterial converter based on MEMS planar structure reconstruction, which can be switched between ring couple and galvanic couple, which includes a base silicon substrate 1, a comb-shaped electrostatic drive structure 2, and a fixed metal structure array 3 , a movable metal structure array 4 and a suspended silicon frame 5, the comb-shaped electrostatic drive structure 2 and the suspended silicon frame 5 are arranged on the base silicon substrate 1, and the suspended silicon frame 5 is connected to the comb-shaped electrostatic drive structure 2, And the suspended silicon frame 5 is set in the air, the fixed metal structure array 3 is set in the suspended silicon frame 5 and on the base silicon substrate 1, and the movable metal structure array 4 is connected to the suspended silicon frame 5 and set in the air; the fixed metal structure array 3 is composed of periodically arranged stru...

specific Embodiment approach 2

[0042] Specific implementation mode two: combination Figure 1 to Figure 4 , the difference between this embodiment and specific embodiment 1 is: the structural elements of the fixed metal structure array 3 are composed of an E-type patterned metal element 3-1 and an E-type fixed silicon substrate 3-2, and the E-type fixed silicon substrate The substrate 3-2 is arranged on the base silicon substrate 1, and the E-type patterned gold element 3-1 is arranged on the E-type fixed silicon substrate 3-2; the structural elements of the movable metal structure array 4 are composed of Consists of a reverse E-shaped patterned metal element 4-1 and a reverse E-shaped movable silicon substrate 4-2, the reverse E-shaped movable silicon substrate 4-2 is connected to the suspended silicon frame 5, suspended in the air, and the reverse E-shaped patterned The metal element 4-1 is arranged on the reverse E-type movable silicon substrate 4-2; the structural parameters of the E-type patterned meta...

specific Embodiment approach 3

[0044] Specific implementation mode three: combination Figure 1 to Figure 4 The difference between this embodiment and the specific embodiment 1 or 2 is: the structural elements of the fixed metal structure array 3 and the structure elements of the movable metal structure array 4 in the functional structural unit of the terahertz metamaterial that can be switched between the ring couple and the galvanic couple The initial pitch of the structural elements is 3 μm. By applying the driving voltage V to the electrode of the comb-shaped electrostatic driving structure 2, the movable metal structure array 4 is driven to translate in the plane, and the function of the terahertz metamaterial that makes the ring couple and the galvanic couple switchable The relative distance between the structural elements of the fixed metal structure array 3 and the structural elements of the movable metal structure array 4 in the structural unit is d, 0 μm≤d≤3 μm. Others are the same as those in Emb...

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Abstract

The invention relates to a terahertz metamaterial converter with switchable ring couple and galvanic couple based on MEMS planar structure reconstruction and a preparation method thereof, relates to aterahertz metamaterial converter with switchable working modes and a preparation method thereof, and aims at solving the problems of small resonant tuning depth of planar terahertz metamaterial ringcouple, complex external equipment required for the excitation mode, narrow optional range of active materials and small linear properties. The terahertz metamaterial converter comprises a base silicon substrate, a comb-shaped electrostatic drive structure, a fixed metal structure array, a movable metal structure array and a suspended silicon frame. The method comprises the steps: 1, deposition ofa silica layer; 2, patterning of a photoresist mask with an anchor structure; 3, formation of the anchor structure; 4, bonding and thinning of structural layers; 5, patterning of metal structure units; 6, patterning of the photoresist mask; and 7, etching silicon and releasing the MEMS structure. The preparation method is mainly used for preparing the terahertz metamaterial converter with switchable ring couple and galvanic couple.

Description

technical field [0001] The invention relates to a terahertz metamaterial converter with switchable working mode and a preparation method thereof. Background technique [0002] In classical dynamics, there are usually two major multipole systems, the electric multipole and the magnetic multipole. Of these two multipole systems, the most common are the electric dipole and the magnetic dipole. The electric dipole can be regarded as a system composed of a pair of opposite charges. Due to its large scattering intensity and wide electromagnetic resonance linewidth, it can be used for antennas or local sensors to detect the near field; the magnetic dipole can be equivalent to a Current loops, with relatively narrow electromagnetic resonance linewidths, can be used in low-power nonlinear processors or optically sensitive devices. As the third type of radiation source, a ring dipole is induced by a ring current to produce a pair of magnetic dipoles in opposite directions, and prese...

Claims

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Application Information

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IPC IPC(8): H01Q15/00H01S1/02G02B1/00G02F1/35G02F1/355B81B7/02B81C1/00
CPCB81B7/02B81C1/00G02B1/002G02F1/353G02F1/355G02F2203/13H01Q15/0086H01S1/02
Inventor 贺训军田玲姚远杨玉强杨文龙姜久兴
Owner HARBIN UNIV OF SCI & TECH
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