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Four-cavity deposition system for metal carbide coating of fuel cell electrode plate

A fuel cell plate and metal carbide technology, which is applied in metal material coating process, coating, ion implantation plating, etc., can solve the problems of limited adjustable parameters, reduced lifespan, and low production efficiency of single equipment. Achieve the effect of reducing coating preparation cost, improving bonding performance and stability performance

Pending Publication Date: 2019-12-06
SHANGHAI ZHIZHEN NEW ENERGY EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In metal carbide coatings, carbon atoms and metal atoms form crystals through strong chemical bonds to have high electrical conductivity, but affected by the deposition environment and deposition process, there will still be a small amount of metal carbide coatings. Metal elements, and these metal elements will escape during the service of the plate, resulting in a decrease in coating performance and a reduction in life
[0005] At present, most of the preparation of metal carbide coatings is concentrated on the research of single equipment, and the production efficiency of single equipment is far lower than that of continuous equipment, and the adjustable parameters are limited, which is not conducive to mass production.

Method used

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  • Four-cavity deposition system for metal carbide coating of fuel cell electrode plate
  • Four-cavity deposition system for metal carbide coating of fuel cell electrode plate
  • Four-cavity deposition system for metal carbide coating of fuel cell electrode plate

Examples

Experimental program
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Effect test

Embodiment 1

[0036] figure 1 Shown is a four-cavity deposition system for a metal carbide coating on a fuel cell plate of the present invention, which mainly includes four vacuum chambers, from left to right are film feeding chamber 1 and transition layer deposition chamber 2 , metal carbide layer deposition chamber 3 and sheet discharge chamber 4; the inlet and outlet of each chamber are provided with chamber valves 5 to separate the chambers on both sides from each other; the sample transmission device 8 passes through the bottom of each chamber , forming a closed loop; the sample holder 6 is set on the sample transmission device 8, and drives the sample 7 through each chamber in turn from left to right to complete the preparation of the coating.

[0037] In the film feeding chamber 1 , the transition layer deposition chamber 2 , the metal carbide layer deposition chamber 3 and the film output chamber 4 , an independent vacuum system, a power supply system and an air circuit system are r...

Embodiment 2~7

[0040] Embodiments 2 to 7 have the same structure as Embodiment 1, and at the same time, have some additional features:

[0041] In Example 2, the cleaning methods in the film feeding chamber 1 include radio frequency self-bias cleaning, pulse bias cleaning, and ion source cleaning symmetrically arranged on both sides of the chamber, while hydrogen gas is introduced into the chamber to clean the samples. The surface oxide is etched.

[0042] In embodiment 2, the bias voltage during cleaning is 100-1000V; the flow rate of hydrogen used in the etching process is 5-500 sccm, and the cleaning time is 0.2-5 minutes.

[0043] In Embodiment 3, 2 to 20 fuel cell plates can be suspended on the sample rack 6, and the loading and unloading process of the fuel cell plates can be completed by clamping or adsorption by a mechanical arm or other similar automation devices; the sample rack The running speed of 6 on the sample transmission device 8 is 0.2-10m / min.

[0044] In Example 3, a ce...

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Abstract

The invention relates to a four-cavity deposition system for a metal carbide coating of a fuel cell electrode plate. The four-cavity deposition system mainly includes a sheet feeding chamber, a transition layer deposition chamber, a metal carbide layer deposition chamber and a sheet outlet chamber in sequence; inlets and outlets of all chambers are provided with chamber valves, and the chamber valves separate every two corresponding chambers on the two sides from each other; a sample transmission device passes through the bottoms of all chambers to form a closed loop; a sample frame is arranged on the sample transmission device and carries a sample to sequentially penetrate through the chambers from left to right. The invention adopts combination of an unbalanced magnetic field and a balanced magnetic field, matching optimization is carried out on the magnetic field mode, a power system and a target base distance, and the bonding performance and stability performance of the metal carbide coating are improved; and continuous small-sized deposition equipment is adopted, a manipulator and other automated equipment are introduced to achieve rapid deposition of the metal carbide coating, can the coating preparation cost can be reduced.

Description

technical field [0001] The invention belongs to the technical field of fuel cells and relates to a four-cavity deposition system for metal carbide coatings on fuel cell pole plates. Background technique [0002] With the continuous development of society, the limited reserves of fossil energy such as coal and petroleum and the adverse impact on the ecological environment, clean and renewable energy have been widely used and received great attention. Among them, the fuel cell, as a power generation device that directly generates electrical energy through electrochemical reactions, has attracted the attention of many institutions and personnel, and the proton exchange membrane fuel cell (PEMFC) that uses hydrogen as fuel has been widely used. Applications, the range of applications already includes automobiles, unmanned aerial vehicles, fixed power stations, etc. In the proton exchange membrane fuel cell, the plate is responsible for distributing gas, transferring heat, and s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/35C23C14/06C23C14/16
CPCC23C14/568C23C14/35C23C14/3485C23C14/0635C23C14/0057C23C14/0036C23C14/165
Inventor 毕飞飞黎焕明姜天豪蓝树槐彭林法
Owner SHANGHAI ZHIZHEN NEW ENERGY EQUIP CO LTD