Four-cavity deposition system for metal carbide coating of fuel cell electrode plate
A fuel cell plate and metal carbide technology, which is applied in metal material coating process, coating, ion implantation plating, etc., can solve the problems of limited adjustable parameters, reduced lifespan, and low production efficiency of single equipment. Achieve the effect of reducing coating preparation cost, improving bonding performance and stability performance
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Embodiment 1
[0036] figure 1 Shown is a four-cavity deposition system for a metal carbide coating on a fuel cell plate of the present invention, which mainly includes four vacuum chambers, from left to right are film feeding chamber 1 and transition layer deposition chamber 2 , metal carbide layer deposition chamber 3 and sheet discharge chamber 4; the inlet and outlet of each chamber are provided with chamber valves 5 to separate the chambers on both sides from each other; the sample transmission device 8 passes through the bottom of each chamber , forming a closed loop; the sample holder 6 is set on the sample transmission device 8, and drives the sample 7 through each chamber in turn from left to right to complete the preparation of the coating.
[0037] In the film feeding chamber 1 , the transition layer deposition chamber 2 , the metal carbide layer deposition chamber 3 and the film output chamber 4 , an independent vacuum system, a power supply system and an air circuit system are r...
Embodiment 2~7
[0040] Embodiments 2 to 7 have the same structure as Embodiment 1, and at the same time, have some additional features:
[0041] In Example 2, the cleaning methods in the film feeding chamber 1 include radio frequency self-bias cleaning, pulse bias cleaning, and ion source cleaning symmetrically arranged on both sides of the chamber, while hydrogen gas is introduced into the chamber to clean the samples. The surface oxide is etched.
[0042] In embodiment 2, the bias voltage during cleaning is 100-1000V; the flow rate of hydrogen used in the etching process is 5-500 sccm, and the cleaning time is 0.2-5 minutes.
[0043] In Embodiment 3, 2 to 20 fuel cell plates can be suspended on the sample rack 6, and the loading and unloading process of the fuel cell plates can be completed by clamping or adsorption by a mechanical arm or other similar automation devices; the sample rack The running speed of 6 on the sample transmission device 8 is 0.2-10m / min.
[0044] In Example 3, a ce...
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