Random micro-lens array structure for light beam homogenization and manufacturing method thereof

Abstract

The invention discloses a random micro-lens array structure for light beam homogenization and a manufacturing method thereof. The random micro-lens array structure comprises a glass material substrateand a random microlens array structure on the surface of the glass material substrate, wherein the sizes and positions of the micro-lenses are randomly distributed. According to the light beam homogenization structure, an incident light beam irradiated to the surface of the light beam homogenization structure is divided into countless sub-light beams with random aperture sizes and random focal lengths by using the micro-lenses which are randomly distributed in size and position; after being refracted by means of the random micro-lenses, the sub-light beams are superposed at different positions behind the substrate, and the micro non-uniformity of each sub-light beam is smoothed in the superposition process, so that an emergent light beam is more uniform. The preparation method of the random micro-lens array structure utilizes a random corrosion initial position caused by a random polygonal metal masking layer, a random corrosion rate caused by random distribution of the concentrationof substances in the glass and isotropy of silicon dioxide corrosion, and realizes micro-lens manufacturing with the positions and sizes randomly distributed.

Description

technical field [0001] The invention relates to the field of beam homogenization and the field of micro-nano processing, in particular to a random microlens array structure for beam homogenization and a manufacturing method thereof. Background technique [0002] In recent years, due to the continuous improvement of optical systems for beam quality requirements, beam homogenization devices used in laser beam shaping, light source lighting, environmental simulation and other fields have made great progress. In laser processing, medical and other laser application fields, because the intensity of the laser beam is Gaussian distribution, the center energy is high, and the edge energy is low. In practical applications, there is a problem of uneven action area. It is often necessary to transform it into a flat-top distribution to achieve The purpose of beam homogenization; in LED lighting, mercury lamp lighting and solar simulator systems, in order to obtain uniform lighting condi...

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Problems solved by technology

The aspherical lens group uses the phase modulation effect of the aspheric lens. The first aspheric surface is responsible for shaping, and the second aspheric surface is responsible for collimation. The energy conversion rate is high, but it does not have beam adaptability. It only has a single-mode Gaussian beam shaping effect. Better; the microlens array system consists of one or two microlens arrays and focusing lenses, but the periodicity of the microlens array and the uniformity of the focusing spot are poor; the diffractive beam homogenization device is designed for a single wavelength, generally The working frequency band is narrow, suitable for specific working occasions with a small spectral range, and not universal

The focal length and period of the microlenses of the random microlens array are randomly distributed, so the beam uniformity effect is good, but limited by the development of continuous surface micro-nano processing technology, the homogenization effect of the random microlens array produced at this stage cannot meet practical needs

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