Unlock instant, AI-driven research and patent intelligence for your innovation.

Optical alignment method of superconducting nanowire single photon detector based on assisted exposure structure

A single-photon detector and superconducting nanowire technology, applied in the field of photoelectric detection, can solve the problems of not forming a detector, achieve uniform line width, high pixel filling ratio, and meet the effects of high-speed communication and long-distance optical communication

Active Publication Date: 2021-05-11
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional assisted exposure structure does not constitute a detector capable of single-photon detection.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Optical alignment method of superconducting nanowire single photon detector based on assisted exposure structure
  • Optical alignment method of superconducting nanowire single photon detector based on assisted exposure structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] see figure 1 , the present invention provides a superconducting nanowire single photon detector based on an auxiliary exposure structure, said superconducting nanowire single photon detector based on an auxiliary exposure structure comprising: a superconducting nanowire single photon detector 1; several auxiliary Exposing the nanowire structure 2, the auxiliary exposure nanowire structure 2 is located on the periphery of the superconducting nanowire single photon detector 1, and is attached to the outer edge of the photosensitive surface of the superconducting nanowire single photon detector 1; The auxiliary exposure nanowire structure 2 is used to align the incident light with the photosensitive surface of the superconducting nanowire single photon detector 1 . The superconducting nanowire single photon detector based on the auxiliary exposure structure of the present invention is provided with a photosensitive sensor attached to the superconducting nanowire single pho...

Embodiment 2

[0041] Please combine figure 1 refer to figure 2 , the present invention also provides a superconducting nanowire single photon detector optical alignment method based on an auxiliary exposure structure, and the method of use is the superconducting nanowire single photon detector based on an auxiliary exposure structure described in Embodiment 1 A light alignment method, the light alignment method of the superconducting nanowire single photon detector based on the auxiliary exposure structure comprises the following steps:

[0042] 1) Provide the superconducting nanowire single photon detector based on the auxiliary exposure structure as described in the first embodiment, the specific structure of the superconducting nanowire single photon detector based on the auxiliary exposure structure please refer to the first embodiment, It will not be repeated here;

[0043] 2) Projecting the incident light onto the superconducting nanowire single photon detector, using the supercond...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
widthaaaaaaaaaa
thicknessaaaaaaaaaa
widthaaaaaaaaaa
Login to View More

Abstract

The invention provides a superconducting nanowire single photon detector optical alignment method based on an auxiliary exposure structure, comprising: a superconducting nanowire single photon detector; several auxiliary exposure nanowire structures located in the superconducting nanowire single photon detection The periphery of the device is attached to the outer edge of the photosensitive surface of the superconducting nanowire single photon detector; the auxiliary exposure nanowire structure is used for optical alignment of incident light and the photosensitive surface of the superconducting nanowire single photon detector. The traditional nanowire-assisted exposure structure helps to process nanowires with uniform line width, but it does not constitute a single-photon detection device. The invention utilizes the auxiliary exposure structure around the central area and designs multiple single-photon detectors, which can locate the position of the light spot through the light counting feedback of the peripheral detectors, so as to align the light spot with the central area.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and relates to a superconducting nanowire single-photon detector, in particular to a superconducting nanowire single-photon detector optical alignment method based on an auxiliary exposure structure. Background technique [0002] Free-space coupling is a coupling method superconducting nanowire single photon detectors, and it is necessary to realize the coupling alignment of superconducting nanowire single photon detectors and spot micron scale at low temperature. Conventional ultra-nanowire single photon detectors do not have the ability to resolve the spot position, which is not conducive to the alignment of high coupling efficiency. During the preparation of nanowires, corresponding auxiliary exposure structures are often added around the nanowires to improve the proximity effect of electron beam exposure, which is beneficial to make the width of the nanowires in the middle reg...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01J11/00
CPCG01J11/00
Inventor 尤立星张成俊张伟君孙兴渠李浩王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI