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Microfluidic device and its preparation method, microfluidic system

A microfluidic device and liquid metal technology, applied in the field of microfluidics, can solve the problems of inability to adapt to the industrialized production of microfluidic devices, many restrictions on patterning and flow channel configuration, and complicated microfluidic injection technology. The use effect is good, the preparation method is simple, and the effect of improving the service life

Active Publication Date: 2020-09-01
INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, 3D direct writing / printing technology cannot achieve good water and oxygen barrier and packaging, and it is easy to form a metal oxide layer on the surface; the microchannel injection process is complicated, and there are many restrictions on patterning and flow channel configuration; imprinting technology The integrated molding of the obtained device is poor; the laser processing technology program is complicated, and the adaptability of the processing link is poor
Therefore, the traditional methods of preparing microfluidic devices have their own shortcomings and deficiencies, and cannot adapt to the industrial production of large-scale microfluidic devices.

Method used

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  • Microfluidic device and its preparation method, microfluidic system

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preparation example Construction

[0033] Such as figure 1 As shown, the preparation method of the microfluidic device provided by the present invention includes:

[0034] S1, providing a shaping die with grooves;

[0035] S2, injecting liquid metal into the groove, and solidifying the liquid metal to obtain solid metal;

[0036] S3, separating the solid metal from the shaping mold, and setting electrodes on the solid metal;

[0037] S4, forming a cladding layer on the surface of the solid metal with electrodes, so that the electrodes at least partially protrude from the cladding layer to obtain a prefabricated device;

[0038] S5, placing the prefabricated device in the substrate solution and curing the substrate solution to obtain a microfluidic device a; wherein, the substrate solution is cured to form a substrate, and the electrodes at least partially protrude from the substrate In addition, heat is released during solidification of the substrate solution to melt the solid metal.

[0039] In step S1, th...

Embodiment 1

[0062] Use CAD to draw the serpentine curved shape of liquid metal, and engrave the corresponding serpentine curved groove on the steel plate through the mold machine. Two mirror-symmetrical molds are prepared. After the two molds are closed, the hollow structure is two serpentine cylindrical channels with electrode positions. Apply sealing grease vaseline on the non-engraved position and the groove, and fill the gap after the two molds are closed to make it more tightly closed.

[0063] Place the above-mentioned mold in a glove box filled with an inert gas environment, select a Galinstan gallium alloy with a ratio of 62.5wt% Ga, 25wt% In, and 12.5wt% Sn, and inject the Galinstan gallium alloy into the mold through an injector at room temperature. In the groove, when the Galinstan gallium alloy fills the entire groove, seal the hole with Vaseline.

[0064] Place the mold in the low-temperature refrigeration part of the refrigeration equipment for contact heat exchange. The r...

Embodiment 2

[0071] Use CAD to draw the serpentine curved shape of liquid metal, and engrave the corresponding serpentine curved groove on the steel plate through the mold machine. Two mirror-symmetrical molds are prepared. After the two molds are closed, the hollow structure is two serpentine cylindrical channels with electrode positions. Apply sealing grease vaseline on the non-engraved position and the groove, and fill the gap after the two molds are closed to make it more tightly closed.

[0072] Place the above-mentioned mold in a glove box filled with an inert gas environment, select a Galinstan gallium alloy with a ratio of 62.5wt% Ga, 25wt% In, and 12.5wt% Sn, and inject the Galinstan gallium alloy into the mold through an injector at room temperature. In the groove, when the Galinstan gallium alloy fills the entire groove, seal the hole with Vaseline.

[0073] Place the mold in the low-temperature refrigeration part of the refrigeration equipment for contact heat exchange. The r...

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Abstract

The invention relates to a microfluidic device, a preparation method thereof, and a microfluidic system. The preparation method includes: providing a shaping mold with a groove; injecting liquid metal into the groove, and solidifying the liquid metal to obtain a solid metal; separating the solid metal from the shaping mold, and setting electrodes on the solid metal; A coating layer is formed on the surface of the solid metal with electrodes, so that the electrodes at least partly protrude from the coating layer to obtain a prefabricated device; the prefabricated device is placed in the substrate solution and the substrate solution is solidified to obtain a microfluidic device; wherein, the substrate solution After solidification to form the substrate, the electrodes protrude at least partially from the substrate, exothermic during the solidification of the substrate solution to melt the solid metal. The preparation method is simple, good in encapsulation, high in device integration, and easy for industrialization. The prepared microfluidic device has good formability, excellent performance, and wide application fields. It can be integrated with a power supply, signal transmitter, and signal receiver to form a microfluidic system. .

Description

technical field [0001] The invention relates to the microfluidic field, in particular to a microfluidic device, a preparation method thereof, and a microfluidic system. Background technique [0002] The traditional preparation methods of microfluidic devices mainly include 3D direct writing / printing technology, microchannel injection technology, embossing technology and laser processing technology. However, 3D direct writing / printing technology cannot achieve good water and oxygen barrier and packaging, and it is easy to form a metal oxide layer on the surface; the microchannel injection process is complicated, and there are many restrictions on patterning and flow channel configuration; imprinting technology The integrated molding of the obtained device is poor; the laser processing technology procedure is complicated, and the adaptability of the processing link is poor. Therefore, the traditional methods for preparing microfluidic devices have their own shortcomings and d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00B81B1/00B82Y30/00
CPCB81C1/00103B81C1/00119B81B1/006B82Y30/00B01L3/502707B29C33/52B29C39/34B22C9/06B22C9/061B22C9/22B22D21/007B22C3/00
Inventor 冯雪张柏诚陈颖付浩然蒋晔刘兰兰
Owner INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG
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