A manufacturing method of a three-dimensional spiral inductance device, an inductance device and a filter

Abstract

The invention relates to the technical field of passive devices, in particular to a method for manufacturing a three-dimensional spiral inductance device. The method includes: engraving a capacitor lower plate on the surface of the gallium arsenide block, and setting a first silicon isolation dielectric layer on the surface of the capacitor lower plate; engraving a first through hole on the first silicon isolation dielectric layer, The first through hole is connected to the lower plate of the capacitor, and the upper plate of the capacitor is carved on the first silicon isolation dielectric layer; from the opposite side of the gallium arsenide block to the lower plate of the capacitor Engraving a second through hole, the second through hole is connected to the lower plate of the capacitor; engraving the back metal wiring part on the side of the gallium arsenide block opposite to the lower plate of the capacitor. An embodiment of the present invention provides a method for manufacturing a three-dimensional spiral inductor device. By processing the two sides of a gallium arsenide block separately, a three-dimensional spiral inductor can be formed and realized to improve its quality factor, thereby improving filter performance and meeting application requirements.

Description

technical field [0001] The invention relates to the technical field of passive devices, in particular to a method for manufacturing a three-dimensional spiral inductance device. Background technique [0002] A filter is a filter circuit composed of capacitors, inductors and resistors. The filter can effectively filter the frequency point of a specific frequency in the power line or frequencies other than this frequency point to obtain a power signal of a specific frequency or eliminate a power signal of a specific frequency. [0003] The gallium arsenide on-chip radio frequency filter developed in the prior art uses planar spiral wiring to realize the inductance, which has the advantages of simple process and small area. However, with the further increase in frequency and the requirements of high-performance passive devices, the quality parameters of this type of inductor cannot achieve greater breakthroughs, and its loss cannot be reduced, making this type of inductor unab...

AI Technical Summary

Problems solved by technology

[0005] The embodiment of the present invention provides a method for manufacturing a three-dimensional spiral inductor device, which can solve the technical problems that the prior art inductance technology cannot obtain a better quality factor and the inductance loss is difficult to further reduce

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