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A kind of modified graphene oxide, slurry, composite film and its preparation method and application

A technology of composite film and oxide stone, which is applied in chemical instruments and methods, carbon compounds, inorganic chemistry, etc., can solve the problems of lower mechanical properties, high toxicity, and lower dielectric constant of composite films, and achieve low curing temperature and low dielectric constant. The effect of the electric constant

Active Publication Date: 2022-03-15
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the cost of introducing fluorine atoms and monomer modification into polyimide is high, and the introduction of air micropores will greatly reduce the mechanical properties
[0004] CN105601921A discloses a preparation method of a low dielectric constant reinforced graphene oxide / polyimide composite film, which reduces the dielectric constant of the composite film by hyperbranched polyester-graphene oxide, and the prepared composite film has a dielectric The electrical constant can be reduced to 2.28, but it still needs to be cured at a high temperature of 300°C
However, the use of high boiling point solvents has high toxicity and does not produce polyamic acid intermediates, does not have flexible processability, and the prepared polyimide does not have the performance of low dielectric constant

Method used

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  • A kind of modified graphene oxide, slurry, composite film and its preparation method and application
  • A kind of modified graphene oxide, slurry, composite film and its preparation method and application
  • A kind of modified graphene oxide, slurry, composite film and its preparation method and application

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Embodiment 1

[0072] This embodiment provides a method for preparing modified graphene oxide, which includes first stirring and dissolving 2 g of graphite oxide in 200 g of a polar organic solvent (N-methylpyrrolidone), and adding 2 g of a curing accelerator (6- Aminoquinoline) and 1 g of dicyclohexylcarbodiimide were reacted at 60 °C under magnetic stirring and inert atmosphere for 24 h, then the solution was suction filtered, washed three times with deionized water and absolute ethanol, and freeze-dried. The corresponding curing accelerator modified graphene oxide (6-aminoquinoline modified graphene oxide) is obtained.

[0073] The present embodiment also provides a method for preparing a slurry, comprising the following steps:

[0074] (1) At room temperature, under mechanical stirring and inert atmosphere, 0.127g of 6-aminoquinoline modified graphene oxide was dissolved in 114g of N-methylpyrrolidone solvent, until there was no obvious precipitate, then ultrasonicated for 1h, and then ...

Embodiment 2

[0079] The only difference from Example 1 is that the N-methylpyrrolidone used in the preparation of the slurry was replaced with N,N-dimethylformamide of the same quality, and other preparation methods were the same as those in Example 1.

Embodiment 3

[0081] The only difference from Example 1 is that the N-methylpyrrolidone used in the slurry preparation process is replaced by N,N-dimethylacetamide of the same quality, and the rest of the preparation methods are the same as in Example 1.

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Abstract

The invention provides a modified graphene oxide, a slurry, a composite film and a preparation method and application thereof, wherein the modified graphene oxide is graphene oxide modified by a curing accelerator; the slurry includes a modified graphene oxide , polyimide and / or polyimide precursors, and organic solvents; the composite film is formed by curing the slurry; the composite film has a higher imidization rate, and a lower dielectric constant and a lower The high curing temperature enables it to be used as a special functional plastic in advanced packaging of semiconductors, which can better avoid warping of ultra-thin wafers and reconstituted wafers, and can effectively avoid damage to heat-resistant components.

Description

technical field [0001] The invention belongs to the field of thin films, and relates to a modified graphene oxide, a slurry, a composite thin film and a preparation method and application thereof. Background technique [0002] Polyimide (PI) is a special engineering plastic with excellent performance, with excellent high and low temperature resistance, electrical properties, mechanical properties, etc., and its dielectric constant is 3.4 to 3.6. In the field of high-frequency communication, it is necessary to further reduce the dielectric constant of polyimide to below 3.0 or even below 2.5. At the same time, polyimide is usually prepared by using aromatic diamine and aromatic dianhydride as basic raw materials, firstly polymerized to form polyamic acid (PAA), and then thermally imidized at high temperature (above 300°C). Due to the rapid development of semiconductor integrated circuits, thermal imidization above 300°C can cause warpage of ultra-thin wafers and reconstitute...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C08K9/04C08K3/04C08L79/08C08J5/18C08G73/10C01B32/198H01L21/56
CPCC08K9/04C08K3/042C08J5/18C08G73/1071C08G73/1039C08G73/1046C08G73/1007C01B32/198H01L21/56C08J2379/08
Inventor 李金辉王涛张国平孙蓉
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI