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Dynamically-adjustable structural color device based on phase-change material and preparing method thereof

A phase-change material and structural color technology, applied in the field of structural color display, can solve the problems of limited controllability and inability to realize continuously adjustable dynamic structural color, and achieve the effect of simple processing method

Inactive Publication Date: 2020-02-28
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the controllability of these dynamic modulation methods is limited, and it is impossible to achieve continuously adjustable dynamic structural color
The above factors limit the further application of structural color, so new modulation methods are needed to obtain effective, continuous and dynamically adjustable structural color display technology

Method used

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  • Dynamically-adjustable structural color device based on phase-change material and preparing method thereof
  • Dynamically-adjustable structural color device based on phase-change material and preparing method thereof

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preparation example Construction

[0040] In order to achieve the above object, the present invention provides a method for preparing a dynamically adjustable structural color device, in figure 1 The schematic diagram of the process flow of the preparation method is shown. The left figure of each step of the process schematic diagram is a vertical section view, and the right figure is a top view. The specific steps are as follows:

[0041] Step S1. Depositing a phase change material film 2 on the substrate material 1, and performing annealing;

[0042] Step S2. Spin-coat photoresist 3 on the phase change material film obtained in step S1, and perform exposure to prepare periodic micro-nano structures;

[0043] Step S3. Depositing a metal thin film 4 on the structure obtained in step S2, and performing stripping to prepare a mask structure;

[0044] Step S4. Etching the periodic structure array obtained in step S3, and removing the remaining metal mask material;

[0045]Step S5. Depositing the metal thin film ...

Embodiment 1

[0067] This embodiment is used to illustrate the preparation method of the dynamically adjustable structural color device of the present invention.

[0068] The following will describe in detail in combination with specific methods.

[0069] according to figure 1 The process flow shown prepares a dynamically tunable structural color device based on phase change materials.

[0070] Step 1. Deposit 90nm VO on the silicon substrate material by magnetron sputtering 2 Films of phase change materials. The target material used in the magnetron sputtering method is a vanadium metal target, using a DC source, the sputtering power is 100W, the pressure is 7mTorr, and the growth temperature is 600°C; after that, a tube furnace is used in Ar / H 2 Annealing was carried out under atmosphere, the annealing temperature was 450°C, the annealing time was 270min, Ar and H 2 The flow rates are 80sccm and 4sccm respectively.

[0071] Step 2. Spin-coat PMMA photoresist on the phase-change mater...

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Abstract

The invention discloses a dynamically-adjustable structural color device based on a phase-change material. The device comprises a substrate, a phase-change material structure and a metal structure that are successively disposed from bottom to top. The phase-change material structure is a periodic micro-nanostructure. The micro-nanostructure is selected from one or more of the followings: a circle,a rectangle and a square. The metal structure is formed by directly depositing a metal thin film on the phase-change material structure. A thickness of the metal structure is smaller than that of thephase-change material structure. The invention further provides a method for preparing the dynamically-adjustable structural color device and application. According to the dynamically-adjustable structural color device based on the phase-change material and the preparing method thereof, the phase-change material is applied to the structural color display field, and by using characteristics of adjustable phase-change material optical properties, a dynamically-adjustable structural color with external drive (such as electricity, heat and the like) is implemented. Preparation of the entire device has characteristics of being simple and flexible in processing method. Device performance has advantages of reversible control, and is significant for practical application of a dynamical structuralcolor and preparation of an active control device.

Description

technical field [0001] The present invention generally relates to the field of structural color display, in particular to a dynamically adjustable structural color device based on a phase change material and its preparation method and application. Background technique [0002] The traditional color development technology is the color development of pigments (such as dyes and pigment agents). The chemical properties of pigments are unstable and unfriendly to the environment. The coloring effect is sensitive to factors such as temperature, humidity and light. In addition, pigmentation cannot achieve high resolution. Inspired by the structural colors that exist in nature, such as the bright feathers of birds and the wings of butterflies, it has become a new color rendering technology to use artificially designed micro-nano structures to realize structural colors. Structural color is realized based on the interaction between light and periodic nanostructures. It has the advanta...

Claims

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Application Information

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IPC IPC(8): G02F1/00G02F1/01
CPCG02F1/0009G02F1/0102
Inventor 顾长志胡莎耿广州李俊杰
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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