High-convergence-ratio ion beam processing method based on multi-band coupling error convergence
A technology of coupling error and processing method, applied in the direction of geometric CAD, etc., can solve the problems that the surface shape accuracy cannot be improved well, affect the processing efficiency and surface shape convergence ratio, and the error cannot be effectively converged, so as to improve the error Convergence ratio, ensure surface shape convergence rate, and improve the effect of convergence ratio
Active Publication Date: 2020-04-03
NAT UNIV OF DEFENSE TECH
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Problems solved by technology
In the process of processing, the convergence efficiency of the same removal function is getting lower and lower, and the removal function of the same beam diameter cannot effectively converge the errors in other frequency bands, which affects the processing efficiency and surface shape convergence ratio, and the surface shape accuracy is also affected. less than good improvement
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[0042] The following will be based on a block size of The initial surface shape is a microcrystalline plane of 4.05nm RMS, and the ion beam machine tool is a KDIBF650L-5VT type ion beam processing machine tool for processing examples, and the high convergence ratio ion beam processing method based on multi-band coupling error convergence of the present invention is further described in detail . Such as figure 1 As shown, the implementation steps of the high-convergence-ratio ion beam processing method based on multi-band coupling error convergence in this embodiment include:
[0043] 1) Initialize the number of iterations i as 0, measure the space domain height error RMS of the workpiece before the i+1 ion beam modification process i ; Space domain height error RMS in the present embodiment i The measuring equipment is ZYGO white light interferometer, and this Ayong atomic force microscope can also be used as needed;
[0044] 2) According to the height error RMS in the sp...
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The invention discloses a high-convergence-ratio ion beam processing method based on multi-band coupling error convergence. The high-convergence-ratio ion beam processing method adjusts a removal function generated according to a spatial domain height error RMSi according to a low-frequency error ratio Ki before processing, and after processing, judges whether to continue to adopt the original removal function or replace the removal function with a smaller beam diameter for iterative processing according to the processing surface shape error convergence rate Vi + 1 until the final error meetsthe requirement. From the perspective of workpiece surface shape frequency errors, the ion beam machine tool is used for carrying out frequency band division error modification; errors of all frequency bands are efficiently converged, and the surface shape convergence ratio is increased, and meanwhile, the modification precision of ion beam machining is improved, and rapid convergence of multi-frequency-band coupling surface shape errors is facilitated, and the high-convergence-ratio ion beam processing method has the advantages of being high in precision and efficiency, high in operability and simple in technological process.
Description
technical field [0001] The invention relates to a high-convergence-ratio processing method for ion beam processing, in particular to a high-convergence-ratio ion beam processing method based on multi-frequency band coupling error convergence. Background technique [0002] The convergence of surface error is directly related to the size of the removal function. As the spatial frequency of the error increases, the beam diameter of the removal function used to correct the error should be smaller. However, in engineering practice, the error surface shape is formed by the coupling of various frequency band errors. For this surface shape of low-frequency error and medium-high frequency error coupling, the medium-high frequency error cannot be effectively removed by using large beam diameter modification; The processing efficiency of small beam diameter modification will be low. [0003] At present, the processing efficiency and convergence accuracy of ion beam processing cannot ...
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Login to View More IPC IPC(8): G06F30/17C03C23/00
CPCC03C23/00C03C23/0005
Inventor 田野戴一帆石峰宋辞
Owner NAT UNIV OF DEFENSE TECH