Silicon-based optoelectronic chip wafer-level online testing device based on grating coupling

Abstract

The invention discloses a silicon-based optoelectronic chip wafer-level online testing device based on grating coupling, and relates to the field of silicon photon and optoelectron integration. The device is used for realizing wafer-level on-line test and polarization dependent loss test of an on-chip component. The device comprises at least one group of test structure, each group of test structure comprises a TE polarization grating, a TM polarization grating, a polarization rotation beam combiner of cascading TE polarization grating and TM polarization grating, a first end face coupler connected to the polarization rotation beam combiner, and a polarization independent mode converter that is formed in a scribing groove and connected to the first end face coupler and a second end face coupler of the on-chip component. According to the invention, on-chip component wafer-level online testing and polarization dependent loss testing can be realized, and the testing cost of the silicon-based optoelectronic chip is effectively reduced.

Description

technical field [0001] The invention relates to the field of integration of silicon photons and optoelectronics, in particular to a wafer-level online testing device for silicon-based optoelectronic chips based on grating coupling. Background technique [0002] In optoelectronic integrated chips and devices, optoelectronic chips are basically interconnected and packaged by end-face coupling. End-face couplers have the advantages of polarization insensitivity, low coupling loss, and easy packaging, but have the disadvantages of small coupling tolerance and inability to perform wafer-level online testing. [0003] The grating has the advantage of large coupling tolerance, and at the same time, the optical fiber can be used to directly conduct non-contact vertical coupling with the grating, which is conducive to the realization of wafer-level testing. However, gratings are sensitive to polarization and difficult to package, making it difficult to realize wafer-level in-circuit...

AI Technical Summary

Problems solved by technology

However, gratings are sensitive to polarization and difficult to package, making it difficult to realize wafer-level online testing and polarization-dependent loss testing of on-chip devices.

[0004] In the process of realizing the present invention, the inventors found that there are at least the following problems in the prior art: In order to realize the wafer-level online testing and polarization-dependent loss testing of on-chip devices, it is necessary to remove a large number of silicon optoelectronic chips from the wafer one by one Mark down and then test. At the same time, the equipment for testing is expensive, which consumes a lot of testing time and manpower, and the testing cost is very high.

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