Multi-mode cell-variable flexible sensor and signal acquisition system
A flexible sensor, multi-modal technology, applied in the field of flexible sensors, can solve problems such as loss of function, difficult to determine whether the measurement results are accurate, and inability to fill positions, so as to reduce the number of interfaces, improve resource utilization, and improve space utilization. Effect
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Embodiment 1
[0101] In this embodiment, the first electrode is used as the upper electrode layer, the third electrode is used as the lower electrode layer, the spacer layer includes a dielectric layer and a piezoelectric layer, a flexible sensor, and the main part includes a total of five-layer structures, such as Figure 7 As shown, from top to bottom are the first electrode 1001, the dielectric layer 1002, the second electrode 1003, the piezoelectric layer 1004, and the third electrode 1005. The first electrode can be used as an electromagnetic wave absorbing layer, and the second electrode 1003 can be used for For measuring strain and humidity sensing layers, the third electrode 1005 can be used to measure temperature. Among them, the first electrode 1 has one pin G, the second electrode 1003 has three pins A, D and F, and the third electrode 1005 has three pins B, C and E. Each unit cell of the flexible sensor has a total of 7 pins. pins. The thickness of the whole device is 20-30 μm,...
Embodiment 2
[0125] like Figure 14 As shown, a flexible variable mode sensor for monitoring physiological information, the sensor includes an upper electrode layer, a piezoelectric layer and a lower electrode layer, and the piezoelectric layer is a spacer layer, wherein:
[0126] The upper electrode layer and the lower electrode layer have the same structure, such as Figure 15 and 16 As shown, the upper / lower electrode layer includes three parts of electrodes, the first part of the electrode is connected at both ends to form a closed serpentine shape, this part of the electrode is provided with a first pin, the second part and the third part have the same structure , in the shape of a sensitive grid, distributed on both sides of the first pin, and the angle between the second part and the third part is 90 degrees. In this embodiment, the direction of the second part of the electrode is the x-axis direction, and the third part The direction of the electrode is the y-axis direction, the ...
Embodiment 3
[0159] In this embodiment, the bottom electrode 3005 is used as the lower electrode layer, the top electrode 3008 is used as the upper electrode layer, and the spacer layer is the intermediate dielectric layer 3006, such as Figure 21As shown, the flexible sensor includes a capacitive layer. The capacitive layer is, from bottom to top, a bottom flexible substrate 3004, a bottom electrode 3005, an intermediate dielectric layer 3006, a conductive electrode 3007, a top electrode 3008, and a top flexible substrate 3009. The bottom flexible substrate The bottom 3004 and the top flexible substrate 3009 are used as substrates, which are isolated from the outside world and adopt flexible insulating materials. The intermediate dielectric layer 3006 is composed of multi-level pyramid-shaped flexible convex structures with different heights, which increases the sensitivity and range of pressure measurement. The top electrode 3008 is composed of two spiral coils and a flat electrode, each ...
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