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All-solid-state variable-focus electrostatic drive type micro lens based on PDMS film

A technology of electrostatic drive and microlens, which is applied in the direction of optical components, optics, instruments, etc., can solve the problems of zoom range, electromagnetic interference, liquid leakage, etc., achieve wide focusing range, fast response speed, solve liquid leakage and Effects of Electromagnetic Interference

Inactive Publication Date: 2020-04-17
TAIYUAN UNIV OF TECH
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] The invention provides an all-solid-state variable-focus electrostatically driven microlens based on PDMS film. The microlens has the advantages of small size, simple structure, low power consumption, no magnetic interference, and wide focusing range, which improves the traditional microlens that cannot zoom Or the defect of small zoom range also solves the problems of liquid leakage and electromagnetic interference in the current variable focus liquid lens

Method used

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  • All-solid-state variable-focus electrostatic drive type micro lens based on PDMS film
  • All-solid-state variable-focus electrostatic drive type micro lens based on PDMS film
  • All-solid-state variable-focus electrostatic drive type micro lens based on PDMS film

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Embodiment 1

[0056] A variable focus microlens, its glass film 1 is silica glass with a thickness of 50 μm, and the PDMS film 3 is made of Dow Corning SYLRARD184. The glass film 1 is harder than the PDMS film 3 and less likely to be deformed; the supporting glass 4 is ordinary glass.

[0057] Production of glass film: Cut a circular glass film with a diameter of 4mm with a laser cutting machine.

[0058] Fabrication of support glass: Cut a circular glass piece with a diameter of 4mm with a glass cutter.

[0059] The full name of MEMS is Micro Electromechanical System, which refers to an electromechanical composite device with a size of a few millimeters or even smaller. Its internal structure is generally on the order of microns or even nanometers, and it is an independent intelligent system. It is mainly composed of three parts: sensors, actuators (actuators) and micro energy sources. Common products include micro accelerometers, micro motors, micro displacement drivers, etc. and their ...

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Abstract

The invention relates to the technical field of optics and the field of MEMS, in particular to an all-solid-state variable-focus electrostatic drive type micro lens based on a PDMS film, which is structurally characterized in that a flexible polymer is placed between two glass layers with different thicknesses. Two annular electrode actuators are respectively connected to the lower bottom surfaceof the glass film connected with the polymer and the upper bottom surface of the glass is supported. When voltage is applied to electrodes, a coulomb force generated between the electrodes forces theglass film to bend, so that a lens structure is integrally formed, the glass film has different bending curvatures due to different voltages, and the focal length of the micro lens is changed. The micro lens is a typical micron-sized MEMS integrated product, and has the advantages of small size, low power consumption, no magnetic interference, wide zoom range, quick response and the like.

Description

technical field [0001] The invention relates to the field of optical technology components and the field of MEMS, in particular to an all-solid-state variable-focus electrostatically driven microlens based on a PDMS film. Background technique [0002] In recent years, with the development of information technology, the performance research of camera based on microlens has become a research hotspot in the current information field. The traditional camera system controls the focal length of the lens to be constant, and uses a voice coil motor to adjust the relative position between the lenses to achieve zooming, so that the overall optical structure occupies a large space. Therefore, traditional microlenses have disadvantages such as complex structure, severe mechanical wear, high energy consumption, electromagnetic interference, and long response time, and are not conducive to miniaturization. At present, experts and scholars at home and abroad have begun to explore microlen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
CPCG02B26/0875
Inventor 李刚李廷鱼王开鹰张文磊孙旭宇杨翠胡杰李朋伟
Owner TAIYUAN UNIV OF TECH
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