A Self-Driven Acceleration Sensor Based on Frictional Nanogenerator
A technology of acceleration sensor and nano-generator, which is applied in the direction of friction generator, acceleration measurement, speed/acceleration/shock measurement, etc. It can solve the problems of weak output signal, temperature drift, large time drift, instability, etc., reaching the limit of use Less, good anti-interference, simple structure effect
Active Publication Date: 2021-05-28
ZHEJIANG UNIV
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Problems solved by technology
Among them, the capacitive acceleration sensor has the disadvantages of high output impedance, poor load capacity, easy to be affected by external interference and unstable phenomenon, even unable to work in severe cases, non-linear output characteristics, and great influence of parasitic capacitance; the resistive acceleration sensor has relatively large Non-linearity, weak output signal, large temperature drift and time drift, not suitable for long-term monitoring, and needs to be reflected in the external circuit or theoretical calculation compensation in the test to accurately measure the shortcomings
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[0040]The present invention will be described in detail below with reference to the drawings and preferred embodiments, and the objectives and effects of the present invention will become more apparent. It should be understood that the specific embodiments described herein are merely intended to illustrate the invention and are not intended to limit the invention.
[0041]The self-driven acceleration sensor of the friction nano generator includes a shielded outer casing, a contact friction power generating device, a contact friction power generating device, including a substrate 2 that is vertically disposed within the shield housing and a substrate The cantilever beam 8 on both sides is fixed to the lower end of the shielding housing 1, and the upper end is fixed to a mass block 3. The cantilever beam 8 and the substrate 2 sequentially set the grid format electrode layer 1 4, the gate format dielectric material layer 1 5, the gate format dielectric material layer 2 6, the grid format ...
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The invention provides a self-driven acceleration sensor based on a frictional nanometer generator, which includes a shielding shell, and a contact friction power generation device is arranged in the shielding shell. The contact friction power generation device includes a substrate vertically arranged in the shielding shell and two cantilever beam. Between the cantilever beam and the substrate is a grid-like electrode layer and a grid-like dielectric material layer. When the shielding shell is under a certain acceleration, the corresponding grids at the cantilever beam and the substrate generate positive and negative charges respectively, thereby generating a potential difference , by detecting the magnitude of the potential difference between the corresponding grids, the acceleration can be obtained by calculating and processing the multiple sets of potential difference data obtained. The invention does not need to provide additional energy, and only relies on the device itself to generate electrical signals. It is a device with less restrictions on use, high efficiency, and environmental protection. It has high precision, wide range, simple structure, good anti-interference, energy saving and environmental protection. Advantages of self-driving.
Description
Technical field[0001]The present invention relates to the field of electrostatic power generation, in particular a self-driven acceleration sensor based on a friction nanchron generator.Background technique[0002]The cantilever contact self-supplied electrostatic acceleration sensor is a good combination of frictional technology and system inertial force, and has good application in actual measurement acceleration. Currently used acceleration sensors are capacitive acceleration sensors and resistance acceleration sensors. Among them, the capacitive acceleration sensor has high output impedance, poor load capacity, and is susceptible to external interference. It is unstable, and even when it is serious, the output characteristics are non-linear, and the parasitic capacitance affects the disadvantage; the resistance accelerometer has a larger Nonlinear, the output signal is weak, warm, and when drifting, it is not suitable for long-term monitoring, and it is necessary to reflect the ex...
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IPC IPC(8): G01P15/125H02N1/04
CPCG01P15/125H02N1/04
Inventor 张鹤姚璘杰黄康旭
Owner ZHEJIANG UNIV