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Multifunctional gas sensor capable of simultaneously detecting humidity, temperature and flow and preparation method thereof

A gas sensor, humidity sensor technology, applied in the direction of measuring devices, instruments, etc., to achieve the effect of high sensitivity, fast response, high sensitivity characteristics

Active Publication Date: 2020-05-15
广州钰芯传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] So far, no such multifunctional sensor has the function of detecting gas flow, humidity and temperature at the same time

Method used

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  • Multifunctional gas sensor capable of simultaneously detecting humidity, temperature and flow and preparation method thereof
  • Multifunctional gas sensor capable of simultaneously detecting humidity, temperature and flow and preparation method thereof
  • Multifunctional gas sensor capable of simultaneously detecting humidity, temperature and flow and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0067] Preparation of multifunctional gas sensor:

[0068] (1) Preparation of graphene oxide-based humidity sensor

[0069] By electron beam evaporation of Cr / Au, on Si / SiO 2 The interdigitated electrodes are processed on the wafer; the 0.1mg / mL graphene oxide aqueous solution is added dropwise to the interdigitated electrode surface. After the water evaporates, the graphene oxide sheet bridges the gap on the interdigitated electrode surface, and the graphene oxide-based humidity sensor is obtained. . Where Si / SiO 2 Si and SiO in wafer 2 The thicknesses of Cr and Au in the Cr / Au layer are 300 μm and 280 nm, respectively, and the thicknesses of Cr and Au are 10 nm and 70 nm, respectively.

[0070] (2) Preparation of Micro Heater

[0071] Using microfabrication techniques on Si / SiO 2 Prepare a micro heater array at a position opposite to the humidity sensor prepared in step S1 on the substrate, specifically, use a photoresist (thickness of 4 μm) to spin-coat on Si / SiO 2 A...

Embodiment 2

[0082] Preparation of multifunctional gas sensor:

[0083] (1) Preparation of graphene oxide-based humidity sensor

[0084] Process interdigitated electrodes on Si substrates by electron beam evaporation of Cr / Au; 0.15mg / mL graphene oxide aqueous solution is added dropwise to the surface of interdigitated electrodes, after water evaporates, graphene oxide sheets bridge the interdigitated electrode surface The gap of the graphene oxide-based humidity sensor is obtained. The thicknesses of Cr and Au in the Cr / Au layer are 10 nm and 70 nm, respectively.

[0085] (2) Preparation of Micro Heater

[0086] Use micromachining technology to prepare a micro-heater array at a position opposite to the humidity sensor prepared in step S1 on the Si substrate, specifically use a photoresist (thickness of 4 μm) to spin-coat on the Si substrate to perform a photolithography process, Subsequent sputtering of the Cr / Pt layer and a lift-off process yielded serpentine platinum microwires on the...

Embodiment 3

[0088] Preparation of multifunctional gas sensor:

[0089] (1) Preparation of graphene oxide-based humidity sensor

[0090] Process interdigitated electrodes on LCP flexible films by electron beam evaporation of Cr / Au; 0.1mg / mL graphene oxide aqueous solution is added dropwise to the surface of interdigitated electrodes, after water evaporates, graphene oxide sheets bridge the interdigitated electrodes surface gaps, resulting in a graphene oxide-based humidity sensor. The thicknesses of Cr and Au in the Cr / Au layer are 10 nm and 70 nm, respectively.

[0091] (2) Preparation of Micro Heater

[0092] Use microfabrication technology to prepare a micro-heater array on the LCP flexible film at a position opposite to the humidity sensor prepared in step S1, specifically, use a photoresist (thickness of 4 μm) to spin-coat on the LCP flexible film for photolithography process, followed by sputtering of the Cr / Pt layer and a lift-off process to obtain serpentine platinum microwires ...

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Abstract

The invention provides a multifunctional gas sensor capable of simultaneously detecting humidity, temperature and flow and a preparation method thereof. A graphene oxide humidity sensor and a micro heater are prepared on the two sides of a single-layer sensor chip respectively, and the micro heater is used for temperature and flow detection. The sensor has ultrahigh sensitivity, short response time, wide detection range and good repeatability for humidity detection at room temperature. The micro-heater of the sensor can be used as a cold-state temperature and flow sensor and a hot-state temperature and flow sensor respectively, specifically, accurate temperature measurement can be carried out within the range of 26-113 DEG C, and the detection sensitivity can be adjusted by modifying the voltage applied to the micro-heater. The multifunctional gas sensor prepared by the invention can be used for human body detection, such as mouth and nose breathing, and can be specifically applied tothe fields of Internet of Things, environmental monitoring, medical care and the like.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, and relates to a gas sensor with humidity, temperature and flow detection functions and a preparation method thereof. Background technique [0002] Compared with a single sensor with a single function, sensing devices with multiple sensing functions have the advantages of low energy consumption, low cost, high integration and small size. Typically, multifunctional sensors are achieved by rationally designing different sensing layers (each for sensing stimuli) or utilizing the same materials for multiparameter detection. [0003] At present, materials such as graphene and metal nanobelts can be used to prepare multifunctional sensors with multilayer structures. Multifunctional sensors with multilayer structures usually use different materials and adopt complex preparation procedures to achieve multifunctional sensing. The process is complicated, which brings difficulties to large-scale applic...

Claims

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Application Information

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IPC IPC(8): G01D21/02
CPCG01D21/02
Inventor 奚亚男胡淑锦
Owner 广州钰芯传感科技有限公司
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