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A kind of production method of high-quality opaque quartz glass ingot

A technology of transparent quartz and glass ingots, which is applied in glass molding, glass manufacturing equipment, manufacturing tools, etc., can solve the problem that liquid small molecule silicone cannot be uniformly adhered, improve density uniformity and yield, and avoid product accumulation material, increase the effect of controllability

Active Publication Date: 2022-02-22
HUBEI FEILIHUA QUARTZ GLASS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a method that can effectively improve the pass rate of opaque quartz glass products, save melting steps, greatly reduce labor costs, and solve the problem of mixing liquid small molecule organic silicon, quartz sand raw materials and white carbon black, stirring A method for manufacturing high-quality opaque quartz glass ingots due to the problem that liquid small-molecule silicone cannot evenly adhere to the surface of quartz sand raw materials in the melting scheme after mixing

Method used

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  • A kind of production method of high-quality opaque quartz glass ingot
  • A kind of production method of high-quality opaque quartz glass ingot
  • A kind of production method of high-quality opaque quartz glass ingot

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Effect test

Embodiment 1

[0049] First select the quartz sand particles with a diameter of 120 meshes as the raw material, and place them in the quartz sand silo 7 of the melting device. Material box 1, organic silicon evaporator 5, feeding pipe 10 and electric heating and heat preservation device 10 are formed; the top of melting furnace 13 is provided with hydrogen-oxygen burner 11, and the top of hydrogen-oxygen burner 11 is provided with quartz sand silo 7, The quartz sand silo 7 is provided with a hydrogen gas source box 8 loaded with quartz sand. The quartz sand silo 7 communicates with the hydrogen gas source box 8 of the quartz sand through the discharge port, and the hydrogen gas source box 8 of the quartz sand passes through the feeding pipe 10. It is communicated with the hydrogen-oxygen burner 11, and the quartz sand-carrying hydrogen gas source box 8 is communicated with the quartz sand-carrying hydrogen gas source at the same time, and the melting furnace 13 below the hydrogen-oxygen burne...

Embodiment 2

[0057] First select the quartz sand particles with a diameter of 140 meshes as the raw material, and place them in the quartz sand silo 7 of the melting device. Material box 1, organic silicon evaporator 5, feeding pipe 10 and electric heating and heat preservation device 10 are formed; the top of melting furnace 13 is provided with hydrogen-oxygen burner 11, and the top of hydrogen-oxygen burner 11 is provided with quartz sand silo 7, The quartz sand silo 7 is provided with a hydrogen gas source box 8 loaded with quartz sand. The quartz sand silo 7 communicates with the hydrogen gas source box 8 of the quartz sand through the discharge port, and the hydrogen gas source box 8 of the quartz sand passes through the feeding pipe 10. It is communicated with the hydrogen-oxygen burner 11, and the quartz sand-carrying hydrogen gas source box 8 is communicated with the quartz sand-carrying hydrogen gas source at the same time, and the melting furnace 13 below the hydrogen-oxygen burne...

Embodiment 3

[0065] First select the quartz sand particles with a diameter of 160 meshes as the raw material, and place them in the quartz sand silo 7 of the melting device. Material box 1, organic silicon evaporator 5, feeding pipe 10 and electric heating and heat preservation device 10 are formed; the top of melting furnace 13 is provided with hydrogen-oxygen burner 11, and the top of hydrogen-oxygen burner 11 is provided with quartz sand silo 7, The quartz sand silo 7 is provided with a hydrogen gas source box 8 loaded with quartz sand. The quartz sand silo 7 communicates with the hydrogen gas source box 8 of the quartz sand through the discharge port, and the hydrogen gas source box 8 of the quartz sand passes through the feeding pipe 10. It is communicated with the hydrogen-oxygen burner 11, and the quartz sand-carrying hydrogen gas source box 8 is communicated with the quartz sand-carrying hydrogen gas source at the same time, and the melting furnace 13 below the hydrogen-oxygen burne...

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Abstract

The invention relates to a method for manufacturing a high-quality opaque quartz glass ingot, belonging to the technical field of quartz glass manufacturing. In the present invention, the liquid organosilicon material is vaporized through an evaporator, and the organic silicon connecting pipe is connected to a feeding pipe equipped with quartz sand particles with a silicon dioxide content of more than 99.95% as a raw material, and the rear end of the organosilicon connecting pipe is equipped with Electric heating and heat preservation device to prevent low-temperature condensation of small-molecule organic silicon gas; the invention uses hydrogen gas to drive the raw material of quartz sand, uses a gas mass flowmeter to control the amount of small-molecule organic silicon added, and finally melts it through a hydrogen-oxygen flame Melted to obtain an opaque quartz glass ingot. The invention adopts the feeding method of hydrogen gas loading, which can effectively avoid the accumulation of raw materials at the mouth of the hydrogen-oxygen burner lamp head and the gas outlet of the wick; Adjust the ratio of small molecule silicone and quartz glass raw materials to increase the controllability of the production process and product development.

Description

technical field [0001] The invention relates to a method for manufacturing a high-quality opaque quartz glass ingot, belonging to the technical field of quartz glass manufacturing. Background technique [0002] Fused silica products are widely used in the semiconductor industry for the production of microelectronic devices. Although transparent quartz is the mainstream product, in recent years, with the continuous development of the semiconductor industry, opaque quartz glass products that can block infrared transmission have gradually attracted attention. [0003] One of the traditional opaque quartz glass production methods is to melt synthetic silica powder and natural quartz sand in an electric furnace, or to combine natural quartz sand with CaCO 3 Blowing agents such as mixed and melted. The opaque quartz glass made by adding such foaming agents contains alkaline impurities, which are extremely defective for devices required for semiconductor applications. Another way...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B20/00
CPCC03B20/00
Inventor 李得军张寒欧阳葆华陈银刘俊龙
Owner HUBEI FEILIHUA QUARTZ GLASS
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