Differential band-pass frequency modulation MEMS gyroscope rate analysis device and method
A technology of analysis device and gyroscope, applied in measurement devices, instruments, etc., can solve problems such as electromagnetic interference, adverse effects of signal-to-noise ratio, and adverse system signal-to-noise ratio.
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Embodiment 1
[0091] Such as figure 1 As shown, Embodiment 1 of the present invention describes a differential band-pass FM MEMS gyroscope rate analysis device, which includes an analog circuit part and a digital circuit part. in:
[0092] The invention puts devices such as crystal oscillators that are prone to electromagnetic interference in the digital circuit, thereby effectively isolating the digital circuit and the analog circuit, avoiding electromagnetic interference from affecting the analog signal, and enhancing the electromagnetic compatibility of the system.
[0093] Specifically, the analog circuit part is an analog signal acquisition circuit for acquiring signals of the MEMS gyroscope. The digital circuit part includes digital signal frequency measurement circuit, digital signal demodulation circuit and digital signal filter circuit.
[0094] The digital circuit part is used to complete the analysis and processing of MEMS gyroscope signals such as frequency measurement, demodu...
Embodiment 2
[0207] Embodiment 2 of the present invention describes a differential band-pass frequency modulation MEMS gyroscope rate analysis method, which is based on the differential band-pass frequency modulation MEMS gyroscope rate analysis device mentioned in the above-mentioned embodiment 1.
[0208] Such as Figure 8 As shown, a differential band-pass frequency modulation MEMS gyroscope rate analysis method includes the following steps:
[0209] The two vibration modes of the gyroscope respectively output four sine wave signals in the form of differential signals.
[0210] Among them, there are two sine wave signals which are the positive output signal of the first vibration mode and the negative output signal of the first vibration mode, and two sine wave signals are the positive output signal of the second vibration mode and the negative output signal of the second vibration mode. state of the negative output signal.
[0211] The above four channels of sine wave signals are res...
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