Laser-induced liquid metal transfer printing circuit, preparation method and flexible pressure sensor

A pressure sensor and liquid metal technology, which is applied in the field of flexible circuits and flexible sensors, can solve the problems of difficult to achieve precise measurement of micro pressure, limited laser peak power, and increased manufacturing steps, and achieves reduced cross-sectional area, high sensitivity, The effect of increasing the resistance value

Active Publication Date: 2020-06-09
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, the existing liquid metal pressure sensors often have the defect of low resolution, it is difficult to achieve precise measurement of small pressure, and the processing steps are cumbersome
Some researchers have proposed to use laser to selectively treat the substrate surface to realize the circuit pattern transfer of liquid metal. Compared with traditional photolithography and other methods, it greatly simplifies the circuit manufacturing process, but it is limited by the peak value of the laser used. Power, it is necessary to mix coloring substances in the substrate in advance to improve the absorption of light energy, so the pattern needs to be transferred to a clean substrate again, which increases the production steps and needs to be further simplified

Method used

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  • Laser-induced liquid metal transfer printing circuit, preparation method and flexible pressure sensor
  • Laser-induced liquid metal transfer printing circuit, preparation method and flexible pressure sensor
  • Laser-induced liquid metal transfer printing circuit, preparation method and flexible pressure sensor

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preparation example Construction

[0035] As an aspect of the present invention, such as figure 1 As shown, a method for preparing a laser-induced liquid metal transfer circuit is provided, using a femtosecond laser to induce the formation of micro-nano structures on the surface of the PDMS layer, thereby changing the adhesion of the PDMS layer surface to liquid metal, and combining the selective transfer of liquid metal Printing to realize the processing of laser-induced liquid metal transfer circuit, including the following steps:

[0036] (1) Paste a layer of water-soluble tape on the PDMS layer to avoid the impact of splashing debris on the area not processed by the femtosecond laser during subsequent femtosecond laser processing;

[0037] (2) Using a femtosecond laser according to a pre-designed circuit pattern, under the guidance of a scanning galvanometer, perform femtosecond laser scanning processing on the surface of the PDMS layer treated in step (1). In the femtosecond laser processing area, the fem...

Embodiment 1

[0070] The components of liquid PDMS, PDMS prepolymer and PDMS curing agent, were purchased from Dow Corning, USA, and the model was Sylgard 184Kit.

[0071] use as figure 1 In the laser-induced liquid metal transfer circuit prepared by the preparation method of the laser-induced liquid metal transfer circuit, such as Figure 5 As shown, the thickness of the PDMS layer is 500 μm, and the thickness of the encapsulated PDMS film is 500 μm. The circuit pattern is spiral, the total length of the spiral is 180mm, the length of the entire spiral pattern area is 24mm, and the width is 18mm. The cross-section of the liquid metal microchannel is 1.5 mm wide and 25 μm thick.

[0072] The PMMA plate of the flexible pressure sensor has a length of 10mm, a width of 10mm, and a thickness of 1mm.

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Abstract

The invention discloses a laser-induced liquid metal transfer printing circuit, a preparation method and a flexible pressure sensor. According to the invention, the surface of a PDMS layer is processed by femtosecond laser, a liquid metal is selectively transferred by utilizing the change of the adhesiveness of the surface of the PDMS layer to the liquid metal before and after femtosecond laser processing, and then a PDMS film is used for packaging to obtain the laser-induced liquid metal transfer printing circuit consisting of liquid metal micro-channels, so that the process is simple, convenient and flexible. A prepared flexible pressure sensor is simple in structure, has extremely high resolution, and can be used for detecting tiny pressure changes which are difficult to detect by similar pressure sensors.

Description

technical field [0001] The invention relates to the fields of flexible circuits and flexible sensors, in particular to a laser-induced liquid metal transfer circuit, a preparation method and a flexible pressure sensor. Background technique [0002] Gallium-based liquid metals are more and more widely used in the field of flexible electronics because they have both the conductivity of metals and the fluidity of liquids. Compared with traditional rigid electronic devices, flexible electronic devices made of liquid metal can withstand extreme bending, stretching and other deformations without failure. Pressure sensors are common electronic devices in daily life and industrial production, and liquid metal-based pressure sensors have attracted the attention of many researchers, and have been successfully applied to soft robots, wearable devices, tactile sensors, etc. The liquid metal pressure sensor is often designed to encapsulate the liquid metal microchannel in the elastomer ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18G01L9/06G01L19/00
CPCG01L1/18G01L9/06G01L19/00
Inventor 吴东吴昊张乐然劳召欣汪超炜
Owner UNIV OF SCI & TECH OF CHINA
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