Verilog-A macro model modeling method for thermal wind speed sensor

Abstract

The invention designs a Verilog-A macro model modeling method for a thermal wind speed sensor. The method mainly considers the thermal convection and heat conduction effects of the thermal wind speedsensor, and comprises the steps: coupling heat conduction and heat radiation effects of the device under various different conditions into the device model by using a macro model technology to form aunit model of the device, and then predicting response characteristics of the whole integrated circuit by directly calling the unit model and a system simulation mode. By utilizing the method, the function and the performance of the designed sensor under a specific wind speed condition can be effectively simulated, a reference basis is provided for the collaborative design of the sensor and an interface circuit, the tape-out frequency is reduced, the cost is greatly reduced, the research and development period is shortened, and the efficiency is improved.

Description

Technical field [0001] The invention relates to a Verilog-A macro model establishment method of a sensor, in particular to a Verilog-A macro model establishment method of a thermal wind speed sensor. Background technique [0002] As an extension of the flow sensor, the MEMS hot air sensor can simultaneously detect air velocity and two-dimensional direction. A complete MEMS system includes sensors, actuators, and corresponding signal processing circuits, which can improve system performance and reliability. In order to shorten the design cycle and reduce costs, there is an urgent need for corresponding CAD tools for system-level design. [0003] At present, the simulation of thermal wind speed sensors is mostly by selecting appropriate material parameters, determining the load and boundary conditions, and using numerical simulation methods (such as finite element method, boundary element method, or finite difference, etc.) to simulate device characteristics. This method Not only t...

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Problems solved by technology

[0003] At present, most of the simulations for thermal wind speed sensors are by selecting appropriate material parameters, determining the load and boundary conditions, and using numerical simulation methods (such as finite element method, boundary element method, or finite difference, etc.) to simulate device characteristics. Not only time-consuming, but also labor-intensive, not suitable for system-level design

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