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A breathing self-driven micro-flow sensor based on lever principle and its preparation method

A lever principle, self-driven technology, applied in the direction of sensors, evaluation of respiratory organs, induction generators, etc., can solve the problems of inconvenient detection of small flow, condensation and formation of dielectric layers, etc., and achieve low cost, small flow change, and simple structure. Effect

Active Publication Date: 2021-06-04
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to: Aim at the above-mentioned current need for large air flow to directly drive the friction film to generate contact and separation to supply energy for the sensor, which causes inconvenience in the detection of small flow and the moisture in the air flow is easy to condense on the surface of the device to form a dielectric layer problem, an object of the present invention is to provide a breath self-driven micro-flow sensor based on the lever principle

Method used

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  • A breathing self-driven micro-flow sensor based on lever principle and its preparation method
  • A breathing self-driven micro-flow sensor based on lever principle and its preparation method
  • A breathing self-driven micro-flow sensor based on lever principle and its preparation method

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Effect test

Embodiment １

[0034] like figure 1 Shown: a breathing self-driven micro-flow sensor based on the lever principle, including a packaging cavity, an air outlet conduit 8 communicating with the packaging cavity, and a power generation unit and a flow collection unit arranged in the packaging cavity. The power generation unit includes a first friction Unit 3 and the second friction unit 4, two pieces of flexible organic film elongated substrates 2 are intersected in the package cavity to form a laborious lever, and the intersection forms a fulcrum; the ends of the long levers far away from the fulcrum are respectively provided with the first A friction unit 3 and a second friction unit 4, the end of the short lever near the fulcrum is provided with a flow collection unit, the flow collection unit is made up of the air intake conduit 7 communicated with the balloon 1, the balloon 1 and the short lever Fixed connection at the end;

[0035] When the air flow passes through the balloon 1, it will ...

Embodiment 2

[0040] On the basis of Example 1, the first friction unit 3 includes a conductive electrode and a positive friction film 31 arranged in sequence at the end of the long lever, and the positive friction film 31 is one of nylon, silk, polyurethane foam, and paper or a composite film made of it. The second friction unit 4 includes another conductive electrode and a negative friction film arranged at the end of the long lever in sequence, and the negative friction film is one of polydimethylsiloxane, Teflon, and polytetrafluoroethylene or a composite film made of it.

[0041] Further, the material of the conductive electrode is any one of aluminum, nickel, copper, silver and gold; the thickness of the electrode is 100-200nm.

Embodiment 3

[0043] like Figure 4 As shown, on the basis of Embodiment 1 or 2, a breathing self-driven micro-flow sensor based on the lever principle also includes a fourth friction unit 6 arranged on the upper or lower surface of the packaging cavity, and the fourth friction unit 6 The third friction unit 5 on one side of the corresponding lever, wherein the second friction unit 4 and the third friction unit 5 are attached to the opposite surface of the same lever, and the whole device forms a three-layer sandwich structure; the third friction unit 5 is composed of The substrate, the conductive electrode, and the negative friction film are composed of stacked layers, and the fourth friction unit 6 is composed of the substrate, the conductive electrode, and the sensitive film 61 that are stacked in sequence; The electrodes are connected to another electrometer 9 by wires.

[0044] The data of the two devices are processed through different structural compensation related sensor knowledge...

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Abstract

The invention discloses a breathing self-driven micro-airflow sensor based on the lever principle and a preparation method thereof, comprising an encapsulation cavity, an air outlet conduit communicating with the encapsulation cavity, a power generation unit and a flow collection unit arranged in the package cavity, the power generation unit It includes a first friction unit and a second friction unit. In the packaging cavity, a laborious lever is formed by crossing two flexible organic film strip substrates, and the intersection forms a fulcrum; the ends of the long lever far away from the fulcrum are respectively opposite to The first friction unit and the second friction unit are provided with a flow collection unit at the short lever end near the fulcrum. By combining the balloon expansion and contraction and the lever principle, the invention makes the negative friction film at the end of the longer lever and its opposite positive friction film contact and separate from each other, which not only effectively utilizes the kinetic energy of the air flow, but also reduces the moisture in the air flow in the device. Possibility of poor generator performance due to surface condensation.

Description

technical field [0001] The invention relates to the fields of energy collection technology, micro-electromechanical systems (MEMS), sensors and electronic polymer sensitive materials, in particular to a breath self-driven micro-flow sensor based on the lever principle and a preparation method thereof. Background technique [0002] Wind energy is a kind of renewable energy that exists widely in nature, and its collection and utilization widely exist in human daily life, such as windmill irrigation, wind power generation, etc. In addition, the energy detection technology for small airflows such as human respiratory airflow size and frequency detection to reflect human vital signs, air conditioning airflow size regulation, and air leakage detection of sealed packaging is also very critical, and is widely used in medical, industrial, agricultural, and aerospace industries. field. Due to the development of MEMS technology in recent years, micro-flow sensors can detect changes in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): A61B5/087A61B5/08A61B5/093H02N1/04H02N1/06
CPCA61B5/0816A61B5/087A61B5/093H02N1/04H02N1/06
Inventor 蒋亚东刘勃豪太惠玲王斯段再华袁震谢光忠
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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