Fabrication method of arrayed optical waveguide flexible tactile sensor

Abstract

The invention discloses a preparation method of an arrayed optical waveguide flexible tactile sensor. The tactile sensor includes a flexible optical waveguide tactile sensitive layer, a flexible circuit layer and a flexible substrate layer glued in sequence. The flexible optical waveguide tactile sensitive layer includes several optical waveguide inner cores distributed in an array, and an optical waveguide cladding integrally covering the optical waveguide inner core. The flexible circuit layer includes a light-emitting power supply end and an optical signal receiving and processing end. The light-emitting power supply end generates an optical signal, and the optical signal is transmitted to the optical signal receiving and processing end through the optical waveguide, and is converted into an electrical signal by the optical signal receiving and processing end, and sent as a wireless signal. go out. The flexible substrate layer is made of flexible material, which plays the role of protection and auxiliary fixation. The tactile sensor of the invention can be used for the collection and processing of tactile information, and has the advantages of high flexibility, high sensitivity, high spatial resolution density and the like. The structure is simple, the power consumption is low, and it is convenient to integrate with the environment to be tested, and it has the advantage of low data cost when the sensing area increases.

Description

technical field [0001] The invention belongs to the technical field of flexible tactile sensors and soft robots, in particular to an arrayed optical waveguide flexible tactile sensor and its preparation method and application. Background technique [0002] Tactile sensors are usually used to collect tactile information such as force, shape, and pressure, and have a wide range of applications in robotics, wearable devices, virtual reality, intelligent prosthetics, and human-computer interaction. Traditional tactile sensors are often prepared by silicon-based semiconductor technology or MEMS (Microelectro Mechanical Systems, microelectromechanical systems) technology, mostly rigid, and are arranged in joints or other positions of interest to measure or calculate the tactile sensation during the interaction process. information. However, compared with the biological skin of the touch, the information collected in this way is often discrete and single-point, and the tactile inf...

AI Technical Summary

Problems solved by technology

The electromagnetic flexible tactile sensor solves the problem of removing the tow cable from the sensor, but at the same time introduces the need for a professional detection environment, which reduces the ease of integration and fewer application scenarios

Liquid metal can maintain followability with the soft substrate and reflect tactile information through the change of resistance value, but it has the disadvantages of high packaging difficulty and easy leakage, and the static working zero point may change continuously with deformation

At the same time, an unavoidable problem for different tactile sensors is that as the sensing area continues to increase and the number of sensitive nodes increases, the amount of data to be processed also increases geometrically, which poses a great challenge to the processing circuit. The large-scale array of sensors brings resistance

Images