Method for determining single crystal graphene orientation

A single crystal graphene and graphene technology, applied in the field of graphene, can solve the problems of high difficulty in sample preparation, complex analysis process, and high difficulty in preparation, and achieve the effects of convenient sample preparation, promotion of application, and reduction of preparation requirements

Active Publication Date: 2020-09-04
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Application Information

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Problems solved by technology

For example, the method of determining the orientation of graphene on copper based on angle-resolved photoelectric spectroscopy is complicated in the analysis process, and the sample preparation is difficult; the method of determining the orientation of graphene on copper by low-energy electron microscopy also has the problem of high difficulty in preparation. (If a series of orientation measurements need to be performed on the sample in the preparation chamber, the sample cannot be taken out for measurement), and the orientation of graphene in a small area can only be determined, and the accuracy is low

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  • Method for determining single crystal graphene orientation
  • Method for determining single crystal graphene orientation
  • Method for determining single crystal graphene orientation

Examples

Experimental program
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Embodiment 1

[0067] S1. Put the copper foil into the CVD quartz chamber, and use a vacuum pump to keep the chamber at a low pressure (specifically 1 Pa). The temperature of the chamber was raised to 1035° C. at 10° C. / min, during which argon gas flow (200 sccm flow rate) was maintained. After rising to 1035°C, introduce methane and hydrogen (the volume ratio of methane:hydrogen is 1:500, and the pressure in the chamber is kept at 2000Pa). After 0.2 hours of reaction, the growth is complete, the chamber is rapidly cooled to room temperature, hydrogen and methane are turned off, and the single crystal graphene-copper foil sample is taken out.

[0068] S2. Put the obtained single-crystal graphene-copper foil sample into a scanning electron microscope with an EBSD probe to obtain the crystal plane orientation information of the copper foil; meanwhile, obtain the graphene topography. Such as figure 1 shown.

[0069] S3, through the graphene topography, measure the angle θ between the edge of...

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Abstract

The invention provides a method for determining single crystal graphene orientation. According to the method, the orientation of the copper substrate is obtained through the electron back scattering diffraction probe in the electron microscope, then the atomic arrangement of copper is obtained, and the orientation of graphene on the copper substrate is determined by comparing the atomic arrangement with the orientation of grown graphene with a regular shape. The method for determining the orientation of the graphene has the advantages of low difficulty in sample preparation and high accuracy and can better determine the orientation of the graphene, so that the invention provides help for large-area preparation of high-quality single-crystal graphene, and promotes the application of the graphene in the aspects of electricity and the like.

Description

technical field [0001] The invention relates to the technical field of graphene, in particular to a method for measuring the orientation of single crystal graphene. Background technique [0002] Since graphene was discovered in 2004, people have developed many methods to prepare graphene, and among them, chemical vapor deposition (CVD) is considered to be the most promising method for preparing high-quality graphene, which has simple, Control and low cost advantages. [0003] In order to eliminate the influence of graphene domains on graphene properties and improve the quality of CVD graphene films, it has been proposed to prepare single-layer single-crystal graphene films on copper substrates based on CVD. In order to verify the single crystal of single-layer graphene, the traditional method is mainly to transfer the graphene from the copper substrate to the copper grid, and use the transmission electron microscope to test the single crystal of graphene. However, the tran...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/2251G01N23/2206G01N23/2202G01N23/203C23C16/26
CPCG01N23/2251G01N23/2206G01N23/2202G01N23/203C23C16/26
Inventor 欧阳奕汪伟刘兆平
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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