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Thickening-optical glue-symmetrical thinning processing method of high-precision ultra-thin optical parts

An optical part, symmetrical thinning technology, applied in metal processing equipment, manufacturing tools, grinding/polishing equipment, etc., can solve problems such as deformation, achieve low surface roughness, high-precision flatness, and avoid uncontrollable deformation. Effect

Active Publication Date: 2021-09-21
DALIAN UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In order to solve the above-mentioned problems in the prior art, the present invention is to design a kind of high-precision ultra-thin optical parts that can effectively solve the deformation problem caused by the release of internal stress, and at the same time avoid the bonding stress caused by the curing shrinkage of the adhesive - Optical adhesive - symmetrical thinning processing method, to meet the requirements of sub-micron parallelism, nano-level flatness and sub-nano-level roughness for ultra-thin parts proposed by precision optics, machinery, electronics and other systems

Method used

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Embodiment Construction

[0023] The present invention will be further described below in conjunction with the accompanying drawings. Such as figure 1 Shown, taking quartz glass as an example, the present invention comprises the following steps:

[0024] In the first step, the quartz blank material is cut into discs with a diameter of 15 mm and a thickness of 0.8 mm.

[0025] In the second step, put the blank material into the annealing furnace for annealing. They are placed side by side on alumina ceramic discs, the sides are wrapped with quartz wool for heat insulation, and the upper surface is covered with alumina ceramic discs. First, keep the temperature at 1100°C for 120min, then cool down to 950°C at 20°C / h, and then close the annealing furnace to allow the parts to cool down to room temperature with the furnace.

[0026] The third step is to put the wafer into the star wheel for double-sided grinding, and the upper and lower end faces are thinned at the same time to ensure that the thinning ...

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Abstract

The invention discloses a thickening-optical glue-symmetrical thinning processing method of high-precision ultra-thin optical parts, comprising the following steps: slicing; annealing; double-sided grinding; surface A grinding; asphalt ring polishing surface A; light glue A surface; B surface grinding; asphalt ring polishing B surface. The annealing method of the present invention can make the residual stress in the blank material distributed symmetrically in the middle plane. Since the residual stress passing through the part is distributed symmetrically about the middle plane, if the removal amount of the two ends of the part is different, the stress release will be asymmetrical, resulting in warping of the part. The double-sided grinding process of the invention can control the parallelism precision of the two ends of the part, and at the same time ensure that the thinning amounts of the two ends are equal during the removal process. The invention adopts the method of sequentially thinning ring polishing and smooth glue bonding to process and control the flatness of both ends. The invention can process ultra-thin, high-precision parallelism, high-precision flatness and high-quality optical parts with low surface roughness.

Description

technical field [0001] The invention belongs to the field of optical processing and relates to a precision processing method for high-precision ultra-thin optical parts. Background technique [0002] Ultra-thin optical components have the advantages of light weight and small thermal gradient, and are widely used in new optical systems that require light weight, miniaturization and high thermal stability. With the continuous improvement of optical system design performance requirements, ultra-thin optical components The processing accuracy and quality requirements of parts are also getting higher and higher. For example, the disk laser pump system requires ultra-thin parts with extremely high precision and quality requirements. [0003] Parallelism, flatness and surface roughness are the main processing indicators of optical parts, which have an important impact on the performance of parts. At present, using chemical mechanical polishing technology, the surface roughness of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00B24B37/08B24B37/10B24B29/02
CPCB24B1/00B24B29/02B24B37/08B24B37/10
Inventor 周平韩晓龙金洙吉慕卿闫英孟德琳康仁科
Owner DALIAN UNIV OF TECH
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