Method of preventing gas leakage of laser gyroscope based on surface CVD grown graphene

A technology of gas leakage and laser gyro, which is applied in the test of fluid tightness, by detecting the appearance of fluid at the leakage point, gaseous chemical plating and other directions, can solve the problems that helium atoms cannot be prevented from permeating and escaping, so as to prevent permeation and escape, Stable performance and simple operation

Inactive Publication Date: 2020-09-11
湖南二零八先进科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The getter only targets the impurity gas released by the laser gyroscope, and cannot prevent the infiltration and escape of helium atoms

Method used

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  • Method of preventing gas leakage of laser gyroscope based on surface CVD grown graphene
  • Method of preventing gas leakage of laser gyroscope based on surface CVD grown graphene
  • Method of preventing gas leakage of laser gyroscope based on surface CVD grown graphene

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Embodiment 1

[0036] Embodiment 1: This embodiment takes the cavity length control mirror (raw material is quartz glass) as an example.

[0037] A method for preventing laser gyroscope gas leakage based on surface CVD growth graphene method, comprising the following steps:

[0038] Copper or nickel with a thickness of several nanometers is plated by magnetron sputtering in the region where the cavity length control mirror needs to grow graphene

[0039] Use the solution, the solution component is H 2 SO 4 : 30%H 2 o 2 =7:3, the length of the soaking chamber is controlled for 2-5 hours, and then ultrasonic cleaning is performed in deionized water, ethanol and acetone in sequence to remove any organic and inorganic impurities on the surface;

[0040] Use a magnetron sputtering device to plate copper or nickel with a thickness of several nanometers on the surface where graphene needs to grow.

[0041] Graphene Growth by CVD

[0042] Use solvents such as ethanol, ether or acetone to ultra...

Embodiment 2

[0058] Embodiment 2: The cavity length control mirror is replaced with other parts of the laser gyroscope that are prone to leaking glass components, and the reaction conditions are appropriately changed to realize the growth of graphene by CVD method, which can prevent helium leakage from other parts of the laser gyroscope.

Embodiment 3

[0059] Embodiment 3: Graphene can be directly grown on the surface of the cavity length control mirror without plating a metal film with a nanometer thickness, and the reaction conditions can be appropriately changed to realize the growth of graphene by CVD method, which can prevent helium leakage from other parts of the laser gyroscope.

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Abstract

The invention discloses a method of preventing gas leakage of a laser gyroscope based on surface CVD grown graphene. The method is characterized by comprising the following steps of A, carrying out magnetron sputtering in an area, needed to grow graphene, of a cavity length control mirror, to prepare a plurality of copper or nickel of nano thickness; B, growing graphene by a CVD method; and C, detecting helium leakage rates before and after using a disposal method by means of a vacuum shield method. Compared with the prior art, the method has the advantages that a graphene layer is added to the cavity length control mirror, which is smallest in thickness, of the laser gyroscope by the CVD method by means of excellent gas barrier property of graphene, so that permeation and escape of heliumis prevented; and the method is stable in performance, easy to operate and low in cost, and can prolong the service life of the laser gyroscope.

Description

technical field [0001] The invention relates to laser gyroscope manufacturing technology and the field of inertial technology, in particular to a method for preventing laser gyroscope gas leakage based on surface CVD growth graphene. Background technique [0002] The core component of the laser gyro is the ring laser, which consists of a resonant cavity and a laser gain medium. The resonant cavity is generally composed of three or four high-quality, high-reflectivity precisely positioned mirrors and a glass cavity. Laser gain media usually use helium and neon. Helium and neon gas are mixed in a certain proportion and filled into the laser gyro cavity according to a certain pressure, and are sealed in the pipeline and gas storage chamber in the resonant cavity. [0003] There are usually 1-2 mirrors used for cavity length control in the three-sided or four-sided mirrors of the laser gyroscope, also known as "cavity translation mirrors", which are ring groove-shaped structur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/02C23C16/448G01M3/20
CPCC23C16/26C23C16/4482C23C16/0281C23C16/0227G01M3/202
Inventor 王飞卢广锋王凡
Owner 湖南二零八先进科技有限公司
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