Flexible sensor and preparation method thereof

A flexible sensor and flexible substrate technology, applied in the field of flexible sensors, can solve the problems of low sensitivity, inability to distinguish various environmental stimuli and various mechanical parts, poor consistency, insufficient deformation, etc., and achieve high sensitivity, small size, and high deformation. degree of effect

Pending Publication Date: 2020-09-25
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the process of use, the flexible sensor also has the following problems: insufficient deformation, low sensitivity, unable to distinguish various environmental stimuli and various mechanical parts, and poor consistency
However, only by applying the above materials to flexible sensors to improve the degree of deformation, sensitivity and consistency, the effect is very limited

Method used

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Embodiment Construction

[0035] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0036] It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0037] In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indic...

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Abstract

The invention discloses a flexible sensor and a preparation method thereof, relates to the field of flexible sensors, and aims to solve the problems of insufficient deformation, low sensitivity and low consistency of the flexible sensor. The flexible sensor comprises a flexible substrate and a nanowire array formed on the flexible substrate, wherein the nanowire array is a nanowire array transferred by a polydimethylsiloxane transfer method. The preparation method of the flexible sensor comprises the technical scheme. The flexible sensor provided by the invention is used for detecting signals.

Description

technical field [0001] The invention relates to the field of flexible sensors, in particular to a flexible sensor and a preparation method thereof. Background technique [0002] The structure of flexible sensors is flexible and diverse, and can be arranged arbitrarily according to the requirements of measurement conditions. Compared with traditional sensors, it solves the problems of miniaturization, integration, and intelligent development. Flexible sensors can be applied to artificial intelligence wearables and medical monitoring equipment to continuously monitor physiological information such as human pulse, electrocardiogram, respiration, and temperature, and then adjust the user's exercise mode, or guide the user to prevent and treat diseases. [0003] In the process of use, the flexible sensor also has the following problems: insufficient deformation, low sensitivity, unable to distinguish various environmental stimuli and various mechanical parts, and poor consistency...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00B81C1/00A61B5/00A61B5/0205A61B5/0402B82Y15/00B82Y40/00
CPCB81B3/00B81C1/00134A61B5/02055A61B5/02A61B5/0225A61B5/08A61B5/6802B82Y15/00B82Y40/00B81B2201/02
Inventor 唐思琪张青竹张兆浩张楠魏千惠张静闫江王文武
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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