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Resonance enhanced optical detector and preparation method thereof

A photodetector and enhanced technology, applied in the field of optical communication, can solve the problems of difficult preparation and single function, and achieve the effects of high reflectivity, simple production process and high response bandwidth

Active Publication Date: 2020-10-23
LIAOCHENG UNIV
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  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a resonance-enhanced photodetector and its preparation method to solve the problems of single function and difficult preparation of traditional resonant cavity-enhanced photodetectors

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  • Resonance enhanced optical detector and preparation method thereof

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Embodiment Construction

[0022] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0023] see figure 1 , the embodiment of the present invention discloses a resonance-enhanced photodetector, including:

[0024] The first subwavelength grating layer 101, the substrate 102, the first contact layer 103, the absorption layer 104, the second contact layer 105, the grating spacer layer 106, and the second subwavelength grating layer ...

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Abstract

An embodiment of the invention provides a resonance enhanced optical detector and a preparation method thereof. The resonance enhanced optical detector comprises a first sub-wavelength grating layer,a substrate, a first contact layer, an absorption layer, a second contact layer, a grating spacer layer and a second sub-wavelength grating layer which are sequentially formed from bottom to top, wherein an n-type contact electrode is formed on the first contact layer, and a p-type contact electrode is formed on the second contact layer. The resonance enhanced optical detector has the advantages of high quantum efficiency, high response bandwidth, polarization sensitivity, capability of realizing angle deflection and simple manufacturing process.

Description

technical field [0001] The invention relates to the technical field of optical communication, in particular to a resonance enhanced optical detector and a preparation method thereof. Background technique [0002] With the widespread use of photodetectors in optical communication systems, imaging systems and military fields, photodetectors are developing towards high performance and high integration. The traditional resonant cavity enhanced photodetector (RCE-PD, ResonantCavity Enhanced-Photo Detector) realizes the resonance of the light beam in the device through a certain logarithm of upper and lower distributed Bragg reflectors (DBR, Distributed Bragg Reflector), so as to In this way, the light absorption rate of RCE-PD is enhanced to enhance the responsivity of the device. However, due to the small difference in refractive index between the two materials of DBR, the logarithm of DBR is more, resulting in the problem of single function and difficult preparation of RCE-PD....

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Application Information

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IPC IPC(8): H01L31/0232H01L31/105H01L31/18
CPCH01L31/02327H01L31/105H01L31/1844Y02P70/50
Inventor 牛慧娟陈南光白成林范鑫烨房文敬于传洋
Owner LIAOCHENG UNIV