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Fully self-powered sensing microsystem based on laser-induced graphene process

A laser-induced, graphene technology, applied in the field of sensing microsystems, can solve the problems of low system integration, incompatible processing technology, working conditions, cumbersome processing technology of individual components, etc., to simplify the preparation process and improve the process compatibility. Effect

Active Publication Date: 2022-03-18
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the existing sensing microsystem technology has at least the following two shortcomings: On the one hand, the existing sensing microsystem is usually directly combined by functionally discrete components, and the material selection and processing between each component The process and working conditions are incompatible with each other, the system integration is low, and the processing technology of individual components is cumbersome, the mechanical properties and biocompatibility of the material are poor, and it cannot be really suitable for human body wearable / skin-type applications and more Harsh natural environment; on the other hand, the long-term stable operation of the sensing microsystem is inseparable from a continuous and sufficient energy supply, and the current electronic equipment is usually powered by batteries, which require frequent replacement of batteries and sacrifice of system portability to meet Energy supply demand; research on smartly collecting dissipated energy in daily life for autonomous energy supply of the system without external power supply incentives needs to be carried out urgently

Method used

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  • Fully self-powered sensing microsystem based on laser-induced graphene process
  • Fully self-powered sensing microsystem based on laser-induced graphene process
  • Fully self-powered sensing microsystem based on laser-induced graphene process

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Embodiment 1

[0030] figure 1 A schematic structural diagram of a self-powered sensing microsystem based on the LIG process is provided for an embodiment of the present invention, including: a LIG energy storage element layer, a PI substrate layer, and a LIG function and energy harvesting element layer.

[0031] At room temperature and normal atmospheric pressure, using CO 2 The LIG obtained by laser single-step induction of PI substrates not only has the advantages of simple process, low cost, and easy batching, but also has excellent physical and chemical properties of the material, such as high electrical conductivity, large specific surface area brought by the three-dimensional network structure, and is suitable for a variety of traditional materials. Sensitive parameters, hydrophilic properties, easy to deposit other sensitive materials on the surface, and properties of volatile electrons. These characteristics make it universally suitable as electrode materials for sensing functional...

Embodiment 2

[0038] image 3 The two physical sensing functional elements based on the LIG process provided in the embodiments of the present invention are for further illustration of the physical sensing functional elements based on the LIG process, and do not limit the present invention.

[0039] image 3 (a) Design example of resistive temperature sensing functional element based on LIG process. Temperature sensing is an important aspect of skin tactile perception. In robots and intelligent prosthetics, temperature sensing can be used to sense the temperature of the body and the temperature of external objects ; In wearable devices, it can be used to monitor body temperature in real time, as an early warning of fever, heatstroke, infection and other diseases; in the field of environmental monitoring, temperature is an important indicator of meteorological / climate change. The temperature sensing functional element based on LIG realizes the ability of continuous temperature monitoring an...

Embodiment 3

[0043] Figure 4 An electrochemical sensing functional element based on the LIG process is provided for the embodiment of the present invention, for further illustration of the electrochemical sensing functional element based on the LIG process, which also does not limit the present invention.

[0044] A variety of substances to be detected that exist in nature can find corresponding sensitive materials to form specific electrochemical reactions. The specific target is used as a sensitive source, and the electrode is used as a conversion medium. The reaction signal is converted into an electrical signal through specific recognition between molecules, and the concentration analysis is performed through the back-end signal processing software.

[0045] As we all know, circulating nutrients and metabolites are important health indicators in the human body, and their concentrations in biological fluids are widely used in medical procedures such as clinical risk assessment, disease...

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Abstract

The invention provides a self-powered sensing microsystem fully based on the laser-induced graphene process. Including: LIG energy storage element layer, PI substrate layer and LIG function and energy harvesting element layer, PI substrate layer is used as the natural structural connection layer and electrical insulation layer of LIG energy storage element layer, LIG ​​function and energy harvesting element layer, and transmits LIG Sensing functional components and LIG energy harvesting components are prepared on the front of the system, LIG ​​energy storage components are prepared on the back of the system, and the LIG perforation mechanism is used to ensure the effective interconnection of the front and back components of the system. The PI substrate layer is used as a laser-induced precursor, and specific parameters are selected for the sensing functional elements, energy harvesting elements, and energy storage elements to induce LIG electrodes. The system of the present invention uses a single-step laser-induced PI substrate to obtain LIG, combined with the excellent physical and chemical properties of LIG, realizes a complete set of sensor sensors including sensing elements, energy harvesting elements, energy storage elements, and system interconnection lines. The system component realizes the integration of the process level and the performance level of portable electronic equipment.

Description

technical field [0001] The invention relates to the technical field of sensing microsystems, in particular to a self-powered sensing microsystem entirely based on a laser-induced graphene process. Background technique [0002] At present, as humans pay close attention to personal health management and the quality of the living environment, the demand for various sensing devices and even sensing systems is increasing day by day. As the "eyes" that record the changes and trends of various parameters in real time in daily life, sensing functional components have attracted the attention of researchers. At the same time, the sensing system has transitioned from the past single-variable monitoring and single-signal conversion mechanism to today's multi-parameter, multi-dimensional interaction, and multi-conversion mechanism. In addition, appropriate material selection, processing methods, and structural design provide the basis for improving the precision, diversity, and reliabil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/16G01D5/24
CPCG01D5/16G01D5/24
Inventor 张海霞王浩彬宋宇崔进京陈学先
Owner PEKING UNIV