Ridge-shaped substrate integrated waveguide band-pass filter based on TSV

Abstract

The invention discloses a ridge-shaped substrate integrated waveguide band-pass filter based on a TSV. The filter comprises a high-resistance silicon substrate, two rectangular metal grooves A are formed in the high-resistance silicon substrate; a plurality of pairs of diaphragms are arranged on the two sides in the metal groove A; the side walls of the diaphragm and the metal groove A are formedby arranging silicon through holes; the top surface insulating layer is arranged at the top of the high-resistance silicon substrate, the rectangular metal groove B is embedded into the top surface insulating layer, the ridge surface metal layer is arranged in the middle of the bottom of the top surface insulating layer, the adjacent side walls of the two rectangular metal grooves A are connectedthrough the ridge surface metal layer, and the other two side walls of the two rectangular metal grooves A are connected through the rectangular metal groove B. The manufacturing process of the ridge-shaped substrate integrated waveguide band-pass filter based on the TSV is compatible with the CMOS process, and the manufacturing cost is low; the size is small, the filter can be conveniently integrated in a miniaturized chip, stacked chip interconnection is realized, the length of an interconnection line is shortened, and the chip performance is greatly improved; and the filter is large in bandwidth and can be applied to the microwave/radio frequency field.

Description

technical field [0001] The invention belongs to the technical field of electronic devices, and relates to a ridge substrate integrated waveguide bandpass filter based on TSV. Background technique [0002] In the 5G era, in microwave and millimeter wave systems, filters are required to have high Q values ​​and low loss coefficients, so waveguide filters are widely used. Rectangular waveguide filters are a widely used traditional form of transmission line for microwave signal guidance and processing. With the rapid development of science and technology, the circuit system is bound to develop in the direction of miniaturization and high function integration. The huge size of the rectangular waveguide filter makes it impossible to integrate in the planar circuit, and the problems of electromagnetic compatibility and electromagnetic interference cannot be ignored. Compared with the traditional rectangular waveguide filter, the structure of the substrate integrated waveguide filt...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a ridge substrate integrated waveguide bandpass filter based on TSV, which solves the problem that the existing i

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