Silicon-based on-chip Fourier transform spectrometer with high resolution and large measurement range

Abstract

The invention discloses a silicon-based on-chip Fourier transform spectrometer with high resolution and a large measurement range. A to-be-measured light source is connected with an input waveguide; the output end of the input waveguide is connected with the input end of a 3dB power beam splitter; two ends of the 3dB beam splitter are respectively connected with one ends of multi-stage optical path selectors, and the two multi-stage optical path selectors are used as upper and lower interference arms; the output ends of the two multi-stage optical path selectors are connected with low-loss Euler spiral lines which have a specific length and is covered with metal electrodes; the other ends of the two low-loss spiral line waveguides are simultaneously input to the input end of the optical power beam combiner; and the output end of the optical power beam combiner is connected with the input end of the optical power detector to monitor the intensity of output optical signals. According tothe invention, the low-loss waveguide and the quasi-continuous thermal regulation waveguide are combined with a traditional on-chip Fourier spectrometer for the first time, and the silicon-based on-chip Fourier transform spectrometer can be used for biosensing, spectral measurement and other systems, and has the advantages of high resolution, large measurement range, high luminous flux, compact structure and the like.

Description

technical field [0001] The invention relates to an on-chip Fourier transform spectrometer, in particular to a high-performance Fourier transform spectrometer based on quasi-continuous adjustment for realizing high resolution and large measurement range. Background technique [0002] A spectrometer is a scientific instrument that decomposes the complex spectrum to be measured into spectral lines. Traditional spectrometers have disadvantages such as large volume, complex structure, and high price. With the continuous development of modern biology, medicine, aerospace, and environmental detection technologies, there is an increasing demand for micro-spectrometers that can monitor and sense the spectra of organisms and materials in real time. [0003] In terms of the performance requirements of the on-chip spectrometer, on the one hand, it has high requirements for high spectral resolution, which can meet the needs of modern sophisticated biological and environmental monitoring;...

AI Technical Summary

Problems solved by technology

The solution using a dispersive spectrometer: Although this solution can achieve higher resolution, it is difficult to achieve high luminous flux due to the limitation of its physical mechanism

For the currently commonly used on-chip Fourier spectrometers, such as spatial extrapolation spectroscopy (SHS), although extremely high resolution can be achieved, the requirements of the Mach-Zehnder array make its size huge, and it is difficult to achieve large measurements. scope

For the newly proposed digital Fourier transform spectrometer, although higher resolution and larger bandwidth can be achieved, when its performance is to be further improved, it will face the problem of crosstalk caused by the increase in the number of optical switches and the increase in the length of the waveguide. The high waveguide loss problem of

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