Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Preparation method of 7000-series aluminum material

An aluminum and anodizing technology, applied in anodizing and other directions, can solve the problems of reducing the quality of finished wafers, easy corrosion of the cavity surface, color difference, etc., and achieve the effect of wide application and easy realization.

Active Publication Date: 2021-01-01
CHINALCO MATERIALS APPL RES INST CO LTD
View PDF14 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Finally, the uneven distribution of microstructure and electrode potential on the aluminum cross section leads to the problem of chromatic aberration in the section after anodic oxidation treatment. The more uneven the microstructure and electrode potential distribution, the more serious the problem of chromatic aberration, that is, the wider and brighter the central stripe
[0004] Under the continuous plasma energy bombardment of the anodized film layer with heterochromatic phenomenon, the surface of the cavity is easy to corrode or accumulate into polymer and finally cannot be used
Because the chemical activity of the plasma used in the etching process is strong, and the ion bombardment effect is obvious, if the chamber material has poor resistance to this type of plasma corrosion, it will bring plasma pollution, affect the etching process, and reduce the quality of the finished wafer. Quality restricts the wide application of aluminum in the field of plasma chambers in the semiconductor industry

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method of 7000-series aluminum material
  • Preparation method of 7000-series aluminum material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A preparation method of 7000 series aluminum material, such as 7050 aluminum alloy, the Zn content of the near-surface area on the cross-section of the 7050 alloy is 6.62%, the Zn content of the central area is 6.30%, and the zinc element content of the near-surface area and the central area is different The value ΔZn=0.32%. The 7050 alloy undergoes semi-continuous casting→homogenization heat treatment→rolling→solution treatment→pre-stretching→aging treatment→anodizing treatment, wherein the solution treatment temperature is 500°C, the holding time is 1.5h, and the cooling rate is 200°C. ℃ / s; anodic oxidation treatment process parameters: dilute sulfuric acid with electrolyte concentration of 15%, temperature of 15℃, current density of 0.5A / dm 2 , the time is 30min.

[0023] The thickness of the oxide layer on the section of the sample was measured by an eddy current thickness gauge to be 2.9 μm. By naked eye observation, the overall color and luster of the sample cro...

Embodiment 2

[0025] Example 2 is based on Example 1, the solution treatment process parameters remain unchanged, and the anodic oxidation time is increased from 30 minutes to 60 minutes. The thickness of the oxide layer on the section of the sample was measured by an eddy current thickness gauge to be 5.1 μm. Observed by naked eyes, the overall color of the sample cross-section is uniform, slightly yellowish. The color difference measurement of the section takes the central area as the standard sample, the color difference ΔE1 of the area near the upper surface of the section is 0.45, and the color difference ΔE-1 of the area near the lower surface of the section is 0.43.

Embodiment 3

[0026] Embodiment 3 is on the basis of embodiment 1, solution treatment process parameter is constant, anodic oxidation current density is by 0.5A / dm 2 Increase to 2.0A / dm 2 . The thickness of the oxide layer on the section of the sample was measured by an eddy current thickness gauge to be 23.9 μm. By naked eye observation, the overall color and luster of the sample cross-section is uniform. The color difference measurement of the section takes the central area as the standard sample, the color difference ΔE1 of the area near the upper surface of the section is 0.89, and the color difference ΔE-1 of the area near the lower surface of the section is 0.86.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Thicknessaaaaaaaaaa
Thicknessaaaaaaaaaa
Login to View More

Abstract

The invention discloses a preparation method of a 7000-series aluminum material. The preparation method comprises the processes of semi-continuous casting, homogenizing heat treatment, rolling, solution treatment, pre-stretching, aging treatment and anodic oxidation; the solution treatment temperature of the preparation method is 470-500 DEG C, the heat preservation time is 1-1.5 hours, and the cooling speed is 150-300 DEG C / s; and the anodic oxidation process is characterized in that dilute sulfuric acid with the concentration of 10%-25% is adopted as an electrolyte, the temperature ranges from 10 DEG C to 20 DEG C, the current density ranges from 0.1 A / dm <2> to 6.0 A / dm <2>, and the time ranges from 20 min to 80 min. According to the preparation method, an oxidation film layer with excellent quality can be formed on the section of the 7000-series aluminum material after anodic oxidation treatment, the surface color difference delta E of the oxidation film is smaller than 1, no central bright line exists, and the method is universally suitable for the 7000-series aluminum material, easy to implement industrially and wide in application range.

Description

technical field [0001] The invention belongs to the field of preparation of aluminum alloy materials, and in particular relates to a preparation method of 7000 series aluminum materials. Background technique [0002] The aluminum alloy has good strength and thermal conductivity, and the anodized aluminum alloy has good wear resistance and corrosion resistance, as well as good insulation properties, and is suitable for preparing plasma etching machine chambers in the semiconductor industry. At present, in the production of high-end wafers, the material of the reaction chamber chamber adopts the surface anodic oxidation treatment method to reduce the corrosion of the chamber and the pollution of metal ions. [0003] In the prior art, there is discoloration on the surface of the aluminum oxide film after anodic oxidation treatment, especially the discoloration of 7000 series aluminum alloys with a high content of zinc element is more serious. Some studies have pointed out that...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C22F1/04C25D11/08
CPCC22F1/04C25D11/08
Inventor 高崇赵丕植贵星卉范亮李宏超
Owner CHINALCO MATERIALS APPL RES INST CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products