Processing method of surface periodic conical microstructure based on Gaussian beam focusing direct writing

Abstract

The invention provides a processing method of a surface periodic conical microstructure based on Gaussian beam focusing direct writing, and aims to solve the problem of low processing efficiency of alarge-area surface periodic conical microstructure in the prior art. The processing method of the surface periodic conical microstructure comprises the following steps of: firstly, importing a Gaussian laser beam into a focusing objective lens to form a light spot; then, adjusting relevant parameters according to a substrate material damage threshold value, so that an area, of which the focusing light spot energy is higher than the substrate material damage threshold value, is ellipsoidal; and after the light spot is focused to a substrate processing surface, translating a substrate to be processed by utilizing a displacement platform, so that the focusing light spot ablates the periodic conical microstructure on the surface of the substrate. According to the processing method, high-precision focusing is not needed, the conical periodic microstructure is directly formed on the surface of the substrate by utilizing the energy distribution gradient of the Gaussian beam after focusing andthrough a scanning motion form, and the processing of a fine three-dimensional structure is completed at one time, so that the speed is high, the efficiency is high, the process flow is simple, and high-precision continuous non-planar processing can be realized.

Description

technical field [0001] The invention belongs to the field of micro-nano processing, in particular to a method for processing surface periodic tapered microstructures based on Gaussian beam focused direct writing. Background technique [0002] The surface microstructure of optical materials can solve technical bottlenecks that cannot be solved by traditional optical films such as anti-reflection and depolarization at large angles of light incidence, broadband anti-reflection, and long-term hydrophobic surfaces. The microstructure is usually processed by means of laser etching or the like. [0003] In the prior art, when it is necessary to process a three-dimensional microstructure, the uniform spot of a laser is usually used to process structural surfaces with different depths and sizes on the surface to be processed in stages, thereby constructing a three-dimensional microstructure. Although this method makes full use of the energy of the laser, it needs to process the non-...

AI Technical Summary

Problems solved by technology

Although this method makes full use of the energy of the laser, it needs to process the non-planar three-dimensional structure multiple times, the processing speed is slow and the efficiency is low, and it cannot realize the non-planar structure surface processing with high continuity requirements, which is difficult to be efficient and fast. Realize the formation of fine three-dimensional structures on the surface of large-area optical materials

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