57 results about "Periodic microstructure" patented technology

The present invention discloses a non-destructive method and apparatus for measuring the 3D topography of a sample having periodic microstructure deposited onto the surface, or deposited onto a film, or buried into the film or sample. In particular, the present invention relates to an optical system and method utilizing polarized light beam, diffracted from the repeated structure, to measure its spatial geometry giving parameters such as profile height, profile widths, sidewall angles, and arbitrary profile shape. The optical system employs a broadband or semi-monochromatic light source to produce a light beam that is polarized and focused onto the periodic structure being measured. The focused beam consists of a whole range of illumination angles that is provided to the structure simultaneously. Transmitted or reflected diffracted light generated by the interaction of the light with the periodic structure is collected by an imaging detector system. The detector records the diffraction light irradiance resolved into illumination angles, diffraction orders and wavelength. The data is applied to determine the geometrical profile of the periodic structure using a reconstruction algorithm that is based on comparisons between measured diffraction data and modeled diffraction irradiance of a profile model using Maxwell's equations. The reconstruction of the profile is performed by iterative adjustments of a profile seed model until the modeled diffraction irradiance matches the measured data within a predefined convergence tolerance.

The present invention provides a polysilicon solar cell texture layer preparation method, relating to a solar cell, in particular to a polysilicon solar cell anti-reflection layer manufacturing process which utilizes a laser holographic method and is combined with a wet etching method. The present invention provides a polysilicon solar cell texture layer preparation method which is used for the fast manufacturing of large-area periodic microstructures, and has low cost as well as good anti-reflection effect. The preparation method comprises the following steps that: a polysilicon silicon chip is pretreated; holographic recording is carried out to a photoresist material on the surface of the polysilicon silicon chip for manufacturing two-dimensional periodic microstructure; with the photoresist as a structure template, a structure is manufactured into a silicon material by adopting acidic corrosive liquid.

The method for detecting a surface enhanced raman spectrum based on interference and diffraction stimulation of the invention belongs to the technical field of spectral analysis and detection. The method comprises the steps of: using a surface enhanced raman spectrum substrate having a periodic microstructure with a periodic size range from 0.05 to 50 microns, emitting the P polarized lasers with wavelength as same as the wavelength for stimulating the raman on the substrate which is absorbed with the sample from different angles, measuring the laser reflectivity of the base, using an incidence angle corresponding to the low reflectivity as the surface plasma incidence resonance angle with the stimulated raman wavelength, emitting the P polarized lasers under the incidence resonance angle on the base absorbed with the sample and receiving a raman signal along the reflection resonance angle. The method of the invention can efficiently stimulate the surface plasma and centrally emit the SERS signals under the resonance angle, therefore increasing the energy density of the signal and promoting the collecting effect of the light signals.

A light directing film and an optical system incorporating same are disclosed. The light directing film includes a first major surface and a microstructured second major surface. The microstructured second major surface has at least two periodic microstructured patterns. The first periodic pattern is arranged along a first direction. The second periodic pattern is arranged along a second direction different from the first direction.

The process of preparing periodical conducting polymer micro structure on the surface of various substrate with fs laser interference field includes the following steps: 1) splitting one fs laser beam into two laser beams focused separately with two lenses and intersected at the focus to realize time and space interference; 2) preparing conducting polymer film conventionally on the surface of the substrate; 3) controlling the output energy density of the laser to make the energy density in the interference points higher than that to melt while lower than the damage threshold of the substrate; and 4) acting the laser interference field onto the conducting polymer film and controlling the laser acted area on the film to form serial points with periodical micro structure of the conducting polymer. Thus formed micro structure has resolution up to submicron or even nanometer size and is expected to be applied in microelectronics and sensor.

The invention relates to a method for the metallation of a workpiece surface. The workpiece surface is provided, in the regions to be metallized, with periodic microstructures (6) that are preferably transfered to the workpiece surface by forming or molding a tool (2) microstructured by means of laser radiation (5). Then at least the microstructured regions of the workpiece surface are metallized in an adhesive manner in order to produce the layer structure.

The present invention discloses a non-destructive method and apparatus for measuring the 3D topography of a sample having periodic microstructure deposited onto the surface, or deposited onto a film, or buried into the film or sample. In particular, the present invention relates to an optical system and method utilizing polarized light beam, diffracted from the repeated structure, to measure its spatial geometry giving parameters such as profile height, profile widths, sidewall angles, and arbitrary profile shape. The optical system employs a broadband or semi-monochromatic light source to produce a light beam that is polarized and focused onto the periodic structure being measured. The focused beam consists of a whole range of illumination angles that is provided to the structure simultaneously. Transmitted or reflected diffracted light generated by the interaction of the light with the periodic structure is collected by an imaging detector system. The detector records the diffraction light irradiance resolved into illumination angles, diffraction orders and wavelength. The data is applied to determine the geometrical profile of the periodic structure using a reconstruction algorithm that is based on comparisons between measured diffraction data and modeled diffraction irradiance of a profile model using Maxwell's equations. The reconstruction of the profile is performed by iterative adjustments of a profile seed model until the modeled diffraction irradiance matches the measured data within a predefined convergence tolerance.

The invention discloses a periodic microstructure noise reduction device and a noise suppression test system and method. The test system comprises a silencing wind tunnel, noise sensors and a model test piece. The model test piece adopts a periodic microstructure noise reduction device and is arranged in the silencing wind tunnel; the periodic microstructure noise reduction device comprises a reference cylinder, radial protruding structures are periodically arranged on the reference cylinder in the axial direction, the diameter of the reference cylinder is D, the length of the reference cylinder is L, the setting period is S, the outer diameter of each radial protruding structure is A, and the thickness of each radial protruding structure is B; and the plurality of noise sensors are arranged in the silencing wind tunnel in an arc-shaped array manner along the airflow direction by taking the center of the model test piece as a circle center. According to the test system provided by the invention, the noise generated by the airflow on the model is acquired through the plurality of noise sensors, and the change of a noise single-tone signal and an overall broadband signal is analyzed, so that a research basis is provided for noise suppression.

The invention relates to a method for electronic dynamic control of crystal silicon surface periodic micro-nano structures based on square hole assistance and belongs to the technical field of femtosecond laser application. The method is based on local transient electronic excitation dynamic control, and femtosecond laser linear polarization is focused through an objective lens and then is focused on the surface of a material through a square hole copper wire mesh to achieve various precise control of different surface periodic micro-nano structures; by controlling laser scanning speed and pulse energy, ablation of strip-shaped surface corrugated structures and multi-point array micro-nano structures is achieved; by controlling the relative positions of the laser polarization direction and the direction (x axis) of the edge of a square hole, direction control of the periodic micro-nano structures can be achieved; by effectively adjusting the included angle between the linear polarization laser direction and the direction (x axis) of the edge of the square hole, selective ablation of the crystal silicon surface periodic micro-nano structures is achieved. Compared with existing methods, the method has the advantages that surface processing precision and efficiency are improved effectively, and efficient and accurate form control of the surface periodic micro-nano structures is achieved.

Provided herein is a method for forming a periodic microstructure on a surface of zirconia-based ceramics, which are not easily mechanically workable, without causing thermal adverse effects. A zirconia-based ceramic having a surface periodic microstructure is also provided. A linearly or circularly polarized laser beam is irradiated to a zirconia-based ceramic surface, and periodic irregularities are formed in a spot of the laser beam. Stripe-pattern irregularities parallel to the direction of polarization can be formed in a spot of a laser beam by irradiating a linearly polarized ultrashort pulsed-laser beam to a zirconia-based ceramic surface. A mesh-like raised region and a dot-like recessed region can be periodically formed by irradiating a circularly polarized ultrashort pulsed-laser beam to a ceramic surface.

Disclosed herein an exposure apparatus capable of implementing a microfabrication onto a work with a higher throughput and a lower cost. The exposure apparatus generates interfering light by crossing two or more branched light beams branched from output light from a coherent light source at a predetermined interfering angle, and exposes the substrate by repeating an irradiation onto the substrate with the interfering light and a conveyance of the substrate. At this moment, the exposure apparatus shapes in interfering light irradiation region on the substrate onto which the interfering light is irradiated into a predetermined shape. Then, the exposure apparatus disposes a plurality of the interfering light irradiation regions in successive shots to be located adjacent to each other on the substrate in a direction of conveying the substrate without the interfering light irradiation regions being overlapped when exposing the substrate while conveying the substrate in a stepwise manner.