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Method for preparing periodic microstructure on metallic film by femto second laser

A metal thin film and femtosecond laser technology, applied in optics, optical components, nonlinear optics, etc., can solve the problems of time-consuming, expensive, processing accuracy, processing quality, etc., and achieve the effect of simple preparation process and high efficiency

Inactive Publication Date: 2003-10-15
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the conventional preparation methods of metal thin film microstructures include electron beam lithography and nanosecond pulse laser direct writing, etc., but there are obvious shortcomings. For example, photolithography technology has many processes and uses photoresist , so it is time-consuming and very expensive, especially for submicron-sized microstructures; and nanosecond laser direct writing technology has a melting process, so its processing accuracy and processing quality are significantly affected

Method used

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  • Method for preparing periodic microstructure on metallic film by femto second laser
  • Method for preparing periodic microstructure on metallic film by femto second laser
  • Method for preparing periodic microstructure on metallic film by femto second laser

Examples

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Effect test

Embodiment 1

[0023] The femtosecond laser emitted by the titanium sapphire femtosecond laser is selected, the pulse width is 120fs, the wavelength is 800nm, the pulse frequency is 1Hz, and the pulse energy is 50μJ. The beam is divided into two beams at a ratio of 1:1 by a beam splitter. The diameter of the beam is 5mm, and the coherence of the two beams is realized by means of the second harmonic generated by the frequency-doubling crystal. The angle between the two beams is 40°, and the two beams are focused on the gold film Above, the sample is controlled by a computer-operated three-dimensional mobile platform, and the spot diameter at the focal point is about 40 μm. In this way, a periodic microstructure is formed in the laser coherence induction region. Using an optical microscope (100× / 0.9 objective lens) to focus on the laser-induced region in the glass sample, periodic microstructures such as figure 2 As shown, the structural period is 1.3 μm, and the gold film linearity is about...

Embodiment 2

[0025] Select a laser with a pulse width of 120 fs, a wavelength of 400 nm, a pulse frequency of 10 Hz, and a pulse energy of 50 μJ. The beam is divided into two beams with a ratio of 1:1 through a beam splitter. The beam diameter is 5 mm. The coherence of the two beams is achieved by The second harmonic generated by the frequency doubling crystal is realized. The angle between the two beams is 30°. Two focusing lenses with a focal length of 100mm are used to focus the two beams on the aluminum film. The sample is controlled by a three-dimensional mobile platform operated by a computer. The diameter of the spot at the focal point is about 40 μm. In this way, a periodic microstructure is formed in the laser coherence induction region. Using an optical microscope (100× / 0.9 objective lens) to focus on the laser-induced region in the glass sample, it was observed that the structural period was 1.5 μm, and the aluminum film line length was about 700 nm.

Embodiment 3

[0027] Choose a laser with a pulse width of 120 fs, a wavelength of 400 nm, a pulse frequency of 10 Hz, and a pulse energy of 50 μJ. The beam is divided into two beams at a ratio of 1:1 through a beam splitter. The beam diameter is 5 mm. The coherence of the two beams is achieved by means of The second harmonic generated by the frequency doubling crystal is realized. The angle between the two beams is 45°. Two focusing lenses with a focal length of 100mm are used to focus the two beams on the chromium film. The sample is controlled by a three-dimensional mobile platform operated by a computer. The diameter of the spot at the focal point is about 40 μm. In this way, a periodic microstructure is formed in the laser coherence induction region. Using an optical microscope (100× / 0.9 objective lens) to focus on the laser-induced region in the glass sample, it is observed that the structural period is 1.1 μm, and the chromium film linearity is about 500 nm.

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Abstract

The laser beam produced by titanium jewel femto second laser is split into two beams and the two laser beams are focused by lenses to realize temporal and spatial coherent superposing before acting on metal film on quartz, common glass or silicon substrate. The laser pulse width, pulse frequency and single pulse energy are so controlled that the laser beam can burn out metal film and produce no damage of the substrate. The coherent laser beam is fixed and the sample on 3D platform is computer-controlled to move to prepare periodical microstructure of metal film.

Description

technical field [0001] The invention relates to the periodic microstructure of the metal thin film, in particular to a method for inducing the periodic microstructure on the metal thin film by using a femtosecond laser coherent field. Background technique [0002] The periodic microstructure of metal thin films has been widely used in the fields of semiconductor microelectronics and high-density information storage. At present, the conventional preparation methods of metal thin film microstructures include electron beam lithography and nanosecond pulse laser direct writing, etc., but there are obvious shortcomings. For example, photolithography technology has many processes and uses photoresist , so it is time-consuming and very expensive, especially for submicron-sized microstructures; and the nanosecond laser direct writing technology has a melting process, so its processing accuracy and processing quality are significantly affected. Contents of the invention [0003] T...

Claims

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Application Information

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IPC IPC(8): G02B27/28G02B27/60G02F1/01
Inventor 赵全忠曲士良赵崇军姜雄伟邱建荣朱从善
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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