A Method for Dynamically Controlling the Periodic Micro-Nano Structure of Crystalline Silicon Surface Based on Square Hole Assisted Electrons
A technology of electronic dynamic control and micro-nano structure, which is applied in the field of femtosecond laser applications, can solve the problems of inability to efficiently control the processing of periodic micro-nano structures on the surface, so as to improve processing accuracy and efficiency, reduce energy consumption, and reduce processing power Effect
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[0051] (1) Under a specific energy, by controlling the femtosecond laser direct writing speed and then adjusting the energy deposited on the surface of the material per unit area, the surface periodic micro-nano structure can be controlled. Specifically, the copper mesh with square holes is selected as a side length of 19 μm, and a 100mm plano-convex lens is used, at 0.1J / cm 2 Under the energy density of 1000Hz, the pulse repetition frequency is 1000Hz, the laser direct writing speed is increased from 100μm / s to 1000μm / s at intervals of 100, keeping the linear polarization direction parallel to the x-axis (one edge of the square hole), passing through the square hole The final focused femtosecond laser pulse regulates the excitation characteristics of the local instantaneous electronic dynamics in a specific area of the irradiated area, so that the single crystal silicon can obtain different surface periodic micro-nano structures under the action of the direct writing femtose...
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