Preparation method of deep sub-wavelength periodic stripe structure on surface of wide bandgap semiconductor
A wide-bandgap semiconductor, deep subwavelength technology, used in welding equipment, manufacturing tools, laser welding equipment, etc., can solve the problem of femtosecond laser absorption-limited multiphoton ionization and tunnel ionization, and periodic fringe structure and morphology. control, wide-bandgap semiconductor processing and application difficulties, etc., to achieve the effect of easy control, high concentration doping, and lower ablation threshold
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[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. Additionally, the protection scope of the present invention should not be limited only to the following specific structures or components or specific parameters.
[0025] In order to describe the technical means and efficacy of the present invention in more detail, the preparation of the deep sub-wavelength periodic stripe structure on the surface of wide-bandgap semiconductor proposed by the present invention will be described in detail below in co...
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