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A kind of manufacturing method of micro thermoelectric device

A technology for thermoelectric devices and manufacturing methods, which is applied in the manufacture/processing of thermoelectric devices, semiconductor/solid-state device manufacturing, electric solid-state devices, etc., and can solve the problems of metallization layer pollution, unfavorable welding process, and inaccurate arrangement of thermoelectric particles, etc. , to achieve high-precision assembly and welding, improve performance consistency, and ensure contact accuracy

Active Publication Date: 2022-07-08
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The entire manufacturing process is done by hand. Due to the certain elasticity of the rubber pendulum tool, the arrangement of the sticky thermoelectric particles is not accurate, and because the polyimide film is used to stick out, the metallized layer on the surface of the particles is polluted by the glue , and the polyimide film is also elastic, which affects the alignment accuracy of the particles and the solder paste on the substrate, which is not conducive to the subsequent soldering process
Therefore, this method cannot produce micro thermoelectric devices that require extremely high precision.

Method used

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  • A kind of manufacturing method of micro thermoelectric device
  • A kind of manufacturing method of micro thermoelectric device
  • A kind of manufacturing method of micro thermoelectric device

Examples

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Embodiment 1

[0032] A method for designing a pendulum mold tool for manufacturing a micro thermoelectric device, comprising the following steps:

[0033] 1) The size of the micro thermoelectric device to be fabricated in this example is 8×8mm 2 , a total of 97 pairs of micro thermoelectric particles; design the steel mold drawings according to the requirements of the electrode substrate of the micro thermoelectric device, such as figure 1 and figure 2 shown;

[0034] 2) Use a continuous laser to process a steel mold according to the drawing described in step 1); the steel mold includes a limit plate and an outer frame arranged around the limit plate, and the top surface of the limit plate and the inner side of the outer frame form a concave The groove is used to accommodate the electrode substrate, and a plurality of square through holes are opened on the limiting plate to limit the position of the thermoelectric particles; The groove depth is 0.35mm; the inner diameter of each square ...

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Abstract

The invention discloses a manufacturing method of a micro thermoelectric device. The specific steps are: 1) designing a steel mold according to the size and pattern of the electrode substrate of the micro thermoelectric device; 2) placing the glued electrode substrate 1 on the steel obtained in step 2 In the groove of the mold, the glue point of the electrode substrate 1 corresponds to the through hole of the limit plate of the steel mold; 3) Put the cut thermoelectric particles into the through hole of the limit plate of the steel mold; Weld the entire steel mold including the electrode substrate 1 and the thermoelectric particles to obtain the semi-finished product of the micro thermoelectric device; 5) After demoulding the semi-finished product of the micro thermoelectric device, weld the electrode substrate 2 on the other side to obtain the micro thermoelectric device. The invention realizes the precise arrangement of the micro-particles, and at the same time, during the welding process, the position of the particles is fixed, which ensures the welding accuracy of the micro-thermoelectric device substrate and the particles, and finally produces a high-precision micro-thermoelectric device. The whole process is fast and efficient. Conducive to mass production use.

Description

technical field [0001] The invention relates to the field of thermoelectric device manufacturing, in particular to a method for manufacturing a miniature thermoelectric device. Background technique [0002] As a new energy device that can realize the direct mutual conversion between electrical energy and thermal energy, thermoelectric devices have attracted more and more attention. Conventional thermoelectric devices are mainly used in civil fields such as wine coolers, semiconductor refrigerators, and ice cream machines. At present, the development of thermoelectric devices is moving towards miniaturization. They are mainly used for energy supply and micro-area precise temperature control of wearable devices, such as thermoelectric watches, Laser temperature control of 5G optical communication modules, etc. One of the difficulties in the fabrication of micro thermoelectric devices compared with conventional thermoelectric devices lies in high-precision assembly and welding...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L35/34H01L21/60H01L21/687H10N10/01
CPCH01L24/81H01L21/68785H01L2224/81815H10N10/01
Inventor 唐新峰唐昊鄢永高苏贤礼
Owner WUHAN UNIV OF TECH
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