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A protection process for perc batteries before and after alkali throwing

A battery and process technology, applied in circuits, electrical components, photovoltaic power generation, etc., can solve the problems of reduced efficiency, too thin oxide layer, affecting the front suede, etc., and achieve the effect of improving conversion efficiency

Active Publication Date: 2022-04-29
TONGWEI SOLAR ENERGY (CHENGDU) CO LID
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Problems solved by technology

[0006] The purpose of the present invention is: in order to solve the prior art in the actual alkali throwing process because the tubular oxidation furnace is to use oxygen and silicon chip reaction to generate silicon oxide, thereby cause the oxide layer to be too thin and uneven, make the alkali throwing additive can not be very good Adhering to the entire front surface, causing a part of the KOH to react with the silicon on the front, affecting the front suede, resulting in a technical problem of efficiency reduction. The invention provides a protection process for perc batteries before and after alkali throwing

Method used

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  • A protection process for perc batteries before and after alkali throwing
  • A protection process for perc batteries before and after alkali throwing

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Embodiment 1

[0028] The experiment selected P-type Czochralski monocrystalline silicon wafers with a crystal orientation of , a silicon wafer size of 158.75mm×158.75mm, a thickness of 180±20um, and a resistivity of 0.5-1.5Ω.cm, and prepared 800 wafers according to the following processing method PERC battery, the technological process of the present invention, such as Figure 1 shown

[0029] A kind of protection technology before and after alkali throwing of perc battery, comprises the following steps:

[0030] Step 1. Texturing: Use groove-type texturing equipment to perform texturing treatment on monocrystalline silicon wafers to form a pyramid textured surface;

[0031] Step 2. Diffusion: Using tubular high-temperature diffusion technology, doping boron into the silicon substrate to prepare a PN junction;

[0032] Step 3, SE: laser SE doping technology, heavy doping is required on the front side of the battery under the metallization;

[0033] Step 4, PECVD deposition of silicon oxi...

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Abstract

The invention discloses a perc battery protection process before and after alkali polishing, relates to the technical field of crystalline silicon solar cell production and manufacturing, and includes the following steps: texturing, diffusion, SE, PECVD deposition of silicon oxide, single-sided PSG removal and alkali polishing, and battery production passivation film on the back of the cell, making a passivation film on the front of the cell, using laser grooving equipment, forming a local contact structure on the back surface, making electrodes, annealing and testing the electrical properties of the sorted cell; , using silane and laughing gas to deposit silicon oxide of more than 50nm on the front side through pecvd equipment, instead of using oxygen to generate silicon oxide in the tubular oxidation furnace, the complete protection of the front suede surface is realized, and the conversion efficiency of the cell is finally improved.

Description

technical field [0001] The invention relates to the technical field of production and manufacture of crystalline silicon solar cells, and more specifically relates to the technical field of protection technology before and after alkaline polishing of perc batteries. Background technique [0002] With the continuous development of photovoltaic technology, crystalline silicon solar cells have developed rapidly as a clean energy product that converts solar energy into electrical energy, and the competition in the photovoltaic industry is becoming more and more fierce. important. With its good passivation structure, the partial back contact solar cell PERC technology can greatly increase the open circuit voltage and short circuit current of the cell, thereby improving the cell efficiency. Now PERC has completely replaced the traditional battery structure and has become the mainstream production technology. The passivation mechanism of Perc is mainly to deposit aluminum oxide o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/068
CPCH01L31/1804H01L31/068Y02E10/547Y02P70/50
Inventor 任朋张林周小燕冉东陈周马国权谢泰宏翟绪锦
Owner TONGWEI SOLAR ENERGY (CHENGDU) CO LID
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