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Anode layer ion source reducing sputtering pollution

An ion source and anode layer technology, applied in sputtering plating, ion implantation plating, coating, etc., can solve the problems of poor processing, easy cracking, and increased cost of graphite, and achieve improved cooling effect and uniformity , the effect of reducing sputtering pollution

Inactive Publication Date: 2021-03-30
光芯薄膜(深圳)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, graphite is very difficult to process, and it is easy to crack, which brings a lot of inconvenience to installation and maintenance, and the cost will increase accordingly

Method used

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  • Anode layer ion source reducing sputtering pollution
  • Anode layer ion source reducing sputtering pollution
  • Anode layer ion source reducing sputtering pollution

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Embodiment Construction

[0028] In order to reduce the sputtering pollution of the ion source of the anode layer and prolong the maintenance time of the ion source of the anode layer, the present invention simulates and calculates the magnetic field distribution of the discharge chamber formed by the inner cathode ring, the outer cathode ring and the anode ring through finite element numerical calculation, and provides a Anode layer ion source with high magnetic mirror ratio. Such as image 3As shown, its main structure includes: anode ring 7, cathode inner ring 2, cathode outer ring 3, permanent magnet 6, yoke 4, gas supply system (12, 13), cooling liquid inlet / outlet pipeline of the anode ring 8. The inlet / outlet pipe 1 for the cathode inner ring cooling liquid, and the inlet / outlet pipe 11 for the yoke cooling liquid. The cathode inner ring 2 is installed opposite to the cathode outer ring 3, and the gap between them is kept constant along the length direction of the ion source. The anode ring 7 ...

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Abstract

The invention provides an anode layer ion source with a high magnetic mirror ratio through finite element numerical calculation. The main structure of the anode layer ion source comprises an anode ring, a cathode inner ring, a cathode outer ring, a permanent magnet, a magnet yoke, an air supply system, a cooling liquid inlet / outlet pipeline of the anode ring, a cooling liquid inlet / outlet pipelineof the cathode inner ring and a cooling liquid inlet / outlet pipeline of the magnet yoke; and the anode layer ion source is characterized in that the magnetic mirror ratio of a magnetic field of a discharge cavity of the anode layer ion source is greater than 2, a magnetic mirror of the magnetic field of the discharge cavity of the anode layer ion source is in central symmetry, the anode layer ionsource carries out cooling by adopting three cooling liquid channels to cool the anode ring, the cathode inner ring, the magnet yoke and the permanent magnet separately. The design can effectively reduce the sputtering pollution of the anode layer ion source and prolong the maintenance time of the anode layer ion source.

Description

technical field [0001] The invention relates to the field of vacuum coating equipment, in particular to an anode layer ion source for reducing sputtering pollution. Background technique [0002] The anode layer ion source is a cold cathode ion source with closed electron migration and emission channels, and its main components include cathode inner ring, cathode outer ring, anode ring, magnet, yoke, gas distribution system, cooling system and drive power supply etc. The discharge cavity formed by the cathode inner ring, the cathode outer ring and the anode ring is surrounded by a magnetic circuit composed of magnets, yokes, cathode inner ring pole shoes, and cathode outer ring pole shoes. The anode ring is connected to a positive potential, the cathode inner ring, and the cathode The outer ring, yoke, etc. are grounded. Under the action of orthogonal electric field and magnetic field, electrons perform closed-loop migration in the discharge chamber and form electron flow. ...

Claims

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Application Information

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IPC IPC(8): C23C14/35
CPCC23C14/35
Inventor 郭杏元曹永盛马金鹏
Owner 光芯薄膜(深圳)有限公司
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