A device for detecting the thickness of anodic gas film in electrolyte plasma polishing and its detection method
A plasma and electrolyte technology, applied in the direction of electric/magnetic thickness measurement, electromagnetic measuring device, etc., can solve the problems of unclear influencing factors, affecting material removal rate and processing effect, etc., and achieve the expansion of measurement range, simple structure and low cost Effect
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[0034] Such as figure 1 As shown, a device for monitoring the gas film thickness of an electrolyte plasma polishing anode is composed of an anode fixture 1 , a gas film thickness measuring patch 2 , and a voltage measuring instrument 3 . The anode fixture and the air film thickness measuring patch are bonded and connected with high-strength insulating glue, and the fine conductive wire 23 (50-100 microns in diameter) is connected with the voltage measuring instrument 3 through the wire 25 . The corresponding device numbers (0, 1, 2, 3...) on the voltage tester (the measurable voltage range is 0-1500V) correspond to each fine conductive wire laid side by side.
[0035] Such as figure 2As shown, the air film thickness measuring patch 2 is composed of a fine conductive wire 23 and two pieces of mica sheets 22 (thickness 0.5-2 mm) used to clamp the fine conductive wire. The fine conductive wires are coated with insulating varnish, and are laid side by side with numbers (0, 1, 2...
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